JPS62197782U - - Google Patents

Info

Publication number
JPS62197782U
JPS62197782U JP8662686U JP8662686U JPS62197782U JP S62197782 U JPS62197782 U JP S62197782U JP 8662686 U JP8662686 U JP 8662686U JP 8662686 U JP8662686 U JP 8662686U JP S62197782 U JPS62197782 U JP S62197782U
Authority
JP
Japan
Prior art keywords
reactive gas
dry pump
power source
pump
drive power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8662686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8662686U priority Critical patent/JPS62197782U/ja
Publication of JPS62197782U publication Critical patent/JPS62197782U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP8662686U 1986-06-09 1986-06-09 Pending JPS62197782U (tr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8662686U JPS62197782U (tr) 1986-06-09 1986-06-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8662686U JPS62197782U (tr) 1986-06-09 1986-06-09

Publications (1)

Publication Number Publication Date
JPS62197782U true JPS62197782U (tr) 1987-12-16

Family

ID=30943106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8662686U Pending JPS62197782U (tr) 1986-06-09 1986-06-09

Country Status (1)

Country Link
JP (1) JPS62197782U (tr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4595152B2 (ja) * 2000-02-01 2010-12-08 パナソニック株式会社 真空排気装置及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110874A (ja) * 1981-12-25 1983-07-01 Fujitsu Ltd 化学反応ガス排気装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58110874A (ja) * 1981-12-25 1983-07-01 Fujitsu Ltd 化学反応ガス排気装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4595152B2 (ja) * 2000-02-01 2010-12-08 パナソニック株式会社 真空排気装置及び方法

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