JPS6199694U - - Google Patents

Info

Publication number
JPS6199694U
JPS6199694U JP18464584U JP18464584U JPS6199694U JP S6199694 U JPS6199694 U JP S6199694U JP 18464584 U JP18464584 U JP 18464584U JP 18464584 U JP18464584 U JP 18464584U JP S6199694 U JPS6199694 U JP S6199694U
Authority
JP
Japan
Prior art keywords
turbo
molecular pump
leak valve
evacuated chamber
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18464584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH018714Y2 (tr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18464584U priority Critical patent/JPH018714Y2/ja
Publication of JPS6199694U publication Critical patent/JPS6199694U/ja
Application granted granted Critical
Publication of JPH018714Y2 publication Critical patent/JPH018714Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18464584U 1984-12-05 1984-12-05 Expired JPH018714Y2 (tr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (tr) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (tr) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199694U true JPS6199694U (tr) 1986-06-25
JPH018714Y2 JPH018714Y2 (tr) 1989-03-08

Family

ID=30742130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18464584U Expired JPH018714Y2 (tr) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH018714Y2 (tr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (ja) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh 真空ポンプを含む装置およびその運転方法
JP2018105300A (ja) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ
JP2019525071A (ja) * 2016-08-15 2019-09-05 エドワーズ リミテッド ターボポンプ通気組立体及び方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010055058A1 (de) * 2010-12-17 2012-06-21 Pfeiffer Vacuum Gmbh Verfahren zum Belüften einer Vakuumpumpe und Anordnung mit einer Vakuumpumpe
DE102014109005A1 (de) * 2014-06-26 2015-12-31 Pfeiffer Vacuum Gmbh Verfahren und Vorrichtung zum Fluten einer Vakuumkammer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009103124A (ja) * 2007-10-25 2009-05-14 Pfeiffer Vacuum Gmbh 真空ポンプを含む装置およびその運転方法
JP2019525071A (ja) * 2016-08-15 2019-09-05 エドワーズ リミテッド ターボポンプ通気組立体及び方法
JP2018105300A (ja) * 2016-12-23 2018-07-05 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプ

Also Published As

Publication number Publication date
JPH018714Y2 (tr) 1989-03-08

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