JPH0245136U - - Google Patents
Info
- Publication number
- JPH0245136U JPH0245136U JP12504488U JP12504488U JPH0245136U JP H0245136 U JPH0245136 U JP H0245136U JP 12504488 U JP12504488 U JP 12504488U JP 12504488 U JP12504488 U JP 12504488U JP H0245136 U JPH0245136 U JP H0245136U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust path
- closing
- fully
- stop valve
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125044U JPH0719554Y2 (ja) | 1988-09-24 | 1988-09-24 | 真空排気装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988125044U JPH0719554Y2 (ja) | 1988-09-24 | 1988-09-24 | 真空排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0245136U true JPH0245136U (tr) | 1990-03-28 |
JPH0719554Y2 JPH0719554Y2 (ja) | 1995-05-10 |
Family
ID=31375300
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988125044U Expired - Lifetime JPH0719554Y2 (ja) | 1988-09-24 | 1988-09-24 | 真空排気装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0719554Y2 (tr) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5967619A (ja) * | 1982-10-12 | 1984-04-17 | Kokusai Electric Co Ltd | 減圧容器を有する半導体製造装置の圧力制御装置 |
JPH026835A (ja) * | 1988-06-24 | 1990-01-11 | Fujitsu Ltd | 制御機能付きバルブ及び減圧室の排気方法 |
-
1988
- 1988-09-24 JP JP1988125044U patent/JPH0719554Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5967619A (ja) * | 1982-10-12 | 1984-04-17 | Kokusai Electric Co Ltd | 減圧容器を有する半導体製造装置の圧力制御装置 |
JPH026835A (ja) * | 1988-06-24 | 1990-01-11 | Fujitsu Ltd | 制御機能付きバルブ及び減圧室の排気方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0719554Y2 (ja) | 1995-05-10 |