JPH03111571U - - Google Patents
Info
- Publication number
- JPH03111571U JPH03111571U JP1739390U JP1739390U JPH03111571U JP H03111571 U JPH03111571 U JP H03111571U JP 1739390 U JP1739390 U JP 1739390U JP 1739390 U JP1739390 U JP 1739390U JP H03111571 U JPH03111571 U JP H03111571U
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- heat treatment
- chamber
- sample
- treatment chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 6
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739390U JPH03111571U (tr) | 1990-02-26 | 1990-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739390U JPH03111571U (tr) | 1990-02-26 | 1990-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03111571U true JPH03111571U (tr) | 1991-11-14 |
Family
ID=31520605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1739390U Pending JPH03111571U (tr) | 1990-02-26 | 1990-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03111571U (tr) |
-
1990
- 1990-02-26 JP JP1739390U patent/JPH03111571U/ja active Pending