JPS62197782U - - Google Patents
Info
- Publication number
- JPS62197782U JPS62197782U JP8662686U JP8662686U JPS62197782U JP S62197782 U JPS62197782 U JP S62197782U JP 8662686 U JP8662686 U JP 8662686U JP 8662686 U JP8662686 U JP 8662686U JP S62197782 U JPS62197782 U JP S62197782U
- Authority
- JP
- Japan
- Prior art keywords
- reactive gas
- dry pump
- power source
- pump
- drive power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8662686U JPS62197782U (pt) | 1986-06-09 | 1986-06-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8662686U JPS62197782U (pt) | 1986-06-09 | 1986-06-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62197782U true JPS62197782U (pt) | 1987-12-16 |
Family
ID=30943106
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8662686U Pending JPS62197782U (pt) | 1986-06-09 | 1986-06-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62197782U (pt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4595152B2 (ja) * | 2000-02-01 | 2010-12-08 | パナソニック株式会社 | 真空排気装置及び方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110874A (ja) * | 1981-12-25 | 1983-07-01 | Fujitsu Ltd | 化学反応ガス排気装置 |
-
1986
- 1986-06-09 JP JP8662686U patent/JPS62197782U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58110874A (ja) * | 1981-12-25 | 1983-07-01 | Fujitsu Ltd | 化学反応ガス排気装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4595152B2 (ja) * | 2000-02-01 | 2010-12-08 | パナソニック株式会社 | 真空排気装置及び方法 |
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