JPS6447994U - - Google Patents
Info
- Publication number
- JPS6447994U JPS6447994U JP14168887U JP14168887U JPS6447994U JP S6447994 U JPS6447994 U JP S6447994U JP 14168887 U JP14168887 U JP 14168887U JP 14168887 U JP14168887 U JP 14168887U JP S6447994 U JPS6447994 U JP S6447994U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- turbo vacuum
- gas
- pump
- release valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14168887U JPS6447994U (pt) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14168887U JPS6447994U (pt) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447994U true JPS6447994U (pt) | 1989-03-24 |
Family
ID=31406978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14168887U Pending JPS6447994U (pt) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447994U (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259297A (ja) * | 1989-03-30 | 1990-10-22 | Shimadzu Corp | 真空ポンプ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
-
1987
- 1987-09-18 JP JP14168887U patent/JPS6447994U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02259297A (ja) * | 1989-03-30 | 1990-10-22 | Shimadzu Corp | 真空ポンプ |