JPS62197362A - Method of joining ceramics to metal - Google Patents
Method of joining ceramics to metalInfo
- Publication number
- JPS62197362A JPS62197362A JP3861286A JP3861286A JPS62197362A JP S62197362 A JPS62197362 A JP S62197362A JP 3861286 A JP3861286 A JP 3861286A JP 3861286 A JP3861286 A JP 3861286A JP S62197362 A JPS62197362 A JP S62197362A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- ceramics
- film
- diamond film
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 21
- 238000000034 method Methods 0.000 title claims description 19
- 229910052751 metal Inorganic materials 0.000 title claims description 18
- 239000002184 metal Substances 0.000 title claims description 18
- 229910003460 diamond Inorganic materials 0.000 claims description 21
- 239000010432 diamond Substances 0.000 claims description 21
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 239000010408 film Substances 0.000 description 23
- 238000010586 diagram Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000003746 solid phase reaction Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- -1 lie Chemical class 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はダイヤモンド膜もしくは１−ｃａｒｂｏｎ膜を
中間接合層としたセラミクスと金属との接合法に関する
〇
〔発明の概要〕
本発明は・セラミクスと金属を接合させる際、ダイヤモ
ンド膜もしくはｉ−ａａｒｂｏｍ膜を、固相反応を利用
して、セラミクス−金属間に中間接合膜として用いる接
合法である◎
〔従来の技術〕
従来、金属とセラミクスを接合するにあたり、各種の接
着剤を利用することにより、接合すると −とができた
〇
〔発明が解決しようとする問題点〕
しかし従来の接着剤を利用した方法では・接着剤の耐熱
温度が、せいぜい１５０℃程度と低く、セラミクスの耐
熱性が良いという特徴を生かすことができないという問
題点を有していた０そこで本発明は従来のこのような問
題点を解決するもので、その目的とするところは、接着
剤を用いずに、金属とセラミクスを接合することである
Ｏ
〔問題点を解決するための手段〕
上記問題点を解決するために、本発明の接合法は、セラ
ミクスと金属を接合するにあたり、中間接合層としてダ
イヤモンド膜もしくはｉ −ｃ ａ ｒ ｂ ｏ ｎ膜
を利用することを特徴とする◇
〔実施例〕
以下に本発明の実施例を図面にもとづいて説明する０第
１図は本発明の実施例を工程順に示す図である。まず第
１図（ａ）の如＜ 、Ｆ ’ｓ ＊ Ｏｏ ｓ Ｎ ｉ
等の遷移金属上にダイヤモンド膜を形成させる。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method of bonding ceramics and metal using a diamond film or a 1-carbon film as an intermediate bonding layer. When joining metals, this is a joining method in which a diamond film or i-aarbom film is used as an intermediate joining film between ceramics and metal using solid phase reaction. ◎ [Conventional technology] Conventionally, metals and ceramics are joined together. However, in the conventional method using adhesives, the heat resistance temperature of the adhesive is limited at most. The temperature was as low as about 150°C, which meant that the good heat resistance of ceramics could not be taken advantage of. Therefore, the present invention aims to solve these conventional problems. The method of the present invention is to join metal and ceramics without using adhesive. In doing so, it is characterized in that a diamond film or an i-carbon film is used as the intermediate bonding layer◇ [Example] An example of the present invention will be described below based on the drawings. FIG. 1 is a diagram showing an example of the present invention in the order of steps. First, as shown in Fig. 1(a), F's * Oos N i
A diamond film is formed on transition metals such as
ダイヤモンドの被複は、ＣＶＤ法、プラズマＣｖＤ法、
イオンビーム蒸着法等、公知の方法で行なうことができ
る。ｌｉｅ、Ｏｏ、Ｎｉ等の遷移金属を基板に用いた場
合、ダイヤモンド膜が合成しにくくなる傾向にあり、ま
た被覆できたダイヤモンド膜は、高温で使用した場合に
変態を起こしてグラファイト化する。ところがこのグラ
ファイトが、基板とダイヤモンド膜の間の応力緩和層と
なり、密着強度を高めるために役立つ。Diamond duplication can be done by CVD method, plasma CVD method,
This can be done by a known method such as ion beam evaporation. When a transition metal such as lie, Oo, Ni, etc. is used for the substrate, it tends to be difficult to synthesize a diamond film, and the diamond film that can be coated undergoes transformation and becomes graphite when used at high temperatures. However, this graphite acts as a stress-relaxing layer between the substrate and the diamond film, helping to increase the adhesion strength.
次いで第１図（６）の如く、セラミクスをダイヤモンド
膜上に接合させる。ＳｉＯ等のセラミクスの接合は非酸
化性雰囲気中で、ダイヤモンド膜とセラミクス間の固相
反応を利用して行なう。Next, as shown in FIG. 1 (6), ceramics are bonded onto the diamond film. Bonding of ceramics such as SiO is performed in a non-oxidizing atmosphere by utilizing a solid phase reaction between the diamond film and the ceramics.
第２図は、第１図の工程とは逆の工程順である◎まず第
２図（ａ）の如＜、Ｓｔａ等のセラミクス上にダイヤモ
ンド膜を形成させる。ダイヤモンドの被覆は、第１図と
同様に、ＣＶＤ法、プラズマＯＶＤ法、イオンビーム蒸
着法等の公知の方法で行なう。セラミクス上へのダイヤ
モンド薄膜の被覆は、金属上への被覆よりも容易に行な
うことができる。FIG. 2 shows the reverse process order from the process shown in FIG. 1. First, as shown in FIG. 2(a), a diamond film is formed on ceramics such as Sta. Diamond coating is performed by a known method such as CVD, plasma OVD, or ion beam evaporation, as in FIG. Coating diamond thin films on ceramics is easier than coating on metals.
次いで第２図（６）の如く、金属をダイヤモンド膜上に
接合させる・この場合は非酸化性雰囲気中で、ダイヤモ
ンドが８００℃程度から金属と固相反応することを利用
する。Next, as shown in FIG. 2 (6), the metal is bonded onto the diamond film. In this case, the solid phase reaction of diamond with the metal at about 800° C. is utilized in a non-oxidizing atmosphere.
以上の様な実施例において、金属とセラミクスの間には
ダイヤモンド膜を用いているが、このダイヤモンド膜の
代り）ｌ（ｉ−ｃａｒｂｏｎ膜を利用しても同様な効果
が得られる◎ｉ −ａ ａ ｒ ｂ ｏ ｎ膜の基板上
への生成は１イオンブレーティング法、プラズマＯＶＤ
法等の公知の方法で行なうことができる。In the above embodiments, a diamond film is used between the metal and the ceramic, but the same effect can be obtained by using an i-carbon film instead of the diamond film. A rbon film is formed on the substrate using one ion blating method, plasma OVD.
This can be done by a known method such as a method.
なお上で述べた実施例において、密着強度がより高いも
のは、セラミクス基板上にダイヤモンド膜を形成し、次
いで金属を固相反応を利用して接合させる方法である◎
〔発明の効果〕
以上述べたような発明によれば、金属とセラミクスの間
にダイヤモンド膜もしくは（７０＆ｒｋｌＯｎ膜という
中間接合層を設けたことにより、金属とセラミクスとの
接合が可能になり、高温においても、この接合部材を使
用でき、セラミクスの特性を生かすことができるという
効果を有する０In the above-mentioned embodiments, a method with higher adhesion strength is a method in which a diamond film is formed on a ceramic substrate and then metal is bonded using a solid phase reaction. [Effects of the Invention] As described above. According to this invention, by providing an intermediate bonding layer called a diamond film or (70&rklOn film) between metal and ceramics, it is possible to bond metals and ceramics, and this bonding member can be used even at high temperatures. 0, which has the effect of making use of the characteristics of ceramics.
第１図（、）〜（６）は本発明の金属とセラミクス間合
の工程図である〇
第２図（α）〜（ｂ）は本発明の第１図とは逆の工程の
セラミクスと金属との接合工程図である０１・・・・・
・金属
２・・・・・・ダイヤモンド膜（ｉ−ｃａｒｂｏｎ［９
）３・・・・−・セラミクス
以上
う
薯１＠Figures 1 (,) to (6) are process diagrams of the process between the metal and ceramics of the present invention. Figures 2 (α) to (b) are the process diagrams of the ceramics of the present invention in the opposite process to that in Figure 1. 01 which is a joining process diagram with metal...
・Metal 2...Diamond film (i-carbon[9
)3・・・・・・・Ceramics and above 1@
Claims (1)
して、ダイヤモンド膜もしくはｉ−ｃａｒｂｏｎ膜を利
用することを特徴とするセラミクスと金属との接合法。A method for joining ceramics and metal, characterized in that a diamond film or an i-carbon film is used as an intermediate joining layer when joining ceramics and metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3861286A JPS62197362A (en) | 1986-02-24 | 1986-02-24 | Method of joining ceramics to metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3861286A JPS62197362A (en) | 1986-02-24 | 1986-02-24 | Method of joining ceramics to metal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197362A true JPS62197362A (en) | 1987-09-01 |
Family
ID=12530083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3861286A Pending JPS62197362A (en) | 1986-02-24 | 1986-02-24 | Method of joining ceramics to metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197362A (en) |
-
1986
- 1986-02-24 JP JP3861286A patent/JPS62197362A/en active Pending
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