JPS62197252U - - Google Patents
Info
- Publication number
- JPS62197252U JPS62197252U JP8618286U JP8618286U JPS62197252U JP S62197252 U JPS62197252 U JP S62197252U JP 8618286 U JP8618286 U JP 8618286U JP 8618286 U JP8618286 U JP 8618286U JP S62197252 U JPS62197252 U JP S62197252U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- axis scanning
- scanning
- voltage
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8618286U JPS62197252U (pt) | 1986-06-05 | 1986-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8618286U JPS62197252U (pt) | 1986-06-05 | 1986-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62197252U true JPS62197252U (pt) | 1987-12-15 |
Family
ID=30942258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8618286U Pending JPS62197252U (pt) | 1986-06-05 | 1986-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62197252U (pt) |
-
1986
- 1986-06-05 JP JP8618286U patent/JPS62197252U/ja active Pending
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