JPS62194759U - - Google Patents
Info
- Publication number
- JPS62194759U JPS62194759U JP8373786U JP8373786U JPS62194759U JP S62194759 U JPS62194759 U JP S62194759U JP 8373786 U JP8373786 U JP 8373786U JP 8373786 U JP8373786 U JP 8373786U JP S62194759 U JPS62194759 U JP S62194759U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- rotational position
- index
- reflected light
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083737U JPH0613258Y2 (ja) | 1986-06-02 | 1986-06-02 | 気相成長装置のサセプタ回転位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083737U JPH0613258Y2 (ja) | 1986-06-02 | 1986-06-02 | 気相成長装置のサセプタ回転位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62194759U true JPS62194759U (fi) | 1987-12-11 |
| JPH0613258Y2 JPH0613258Y2 (ja) | 1994-04-06 |
Family
ID=30937594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986083737U Expired - Lifetime JPH0613258Y2 (ja) | 1986-06-02 | 1986-06-02 | 気相成長装置のサセプタ回転位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613258Y2 (fi) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56111419A (en) * | 1980-02-08 | 1981-09-03 | Toshiba Corp | Optical position detector |
-
1986
- 1986-06-02 JP JP1986083737U patent/JPH0613258Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56111419A (en) * | 1980-02-08 | 1981-09-03 | Toshiba Corp | Optical position detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613258Y2 (ja) | 1994-04-06 |