JPS62194759U - - Google Patents
Info
- Publication number
- JPS62194759U JPS62194759U JP8373786U JP8373786U JPS62194759U JP S62194759 U JPS62194759 U JP S62194759U JP 8373786 U JP8373786 U JP 8373786U JP 8373786 U JP8373786 U JP 8373786U JP S62194759 U JPS62194759 U JP S62194759U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- rotational position
- index
- reflected light
- peripheral surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000001947 vapour-phase growth Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図および第２図は本考案の一実施例を示し
第１図は要部の平面図、第２図は第１図の一部拡
大図、、第３図は気相成長装置の一例の断面図、
第４図および第５図は異なる形状の従来例の要部
平面図、第６図は第４図の一部拡大図、第７図は
従来例のサセプタ回転に伴う反射光量の変化を示
す線図、第８図は本考案の他の実施例における要
部断面図、第９図は第８図の一部拡大図、第１０
図は本考案におけるサセプタ回転に伴う反射光量
の変化を示す線図である。
４……サセプタ、１６……光源、１９……検知
手段、３１，３６……指標、３２……光、３３…
…反射光。
Figures 1 and 2 show an embodiment of the present invention, Figure 1 is a plan view of the main parts, Figure 2 is a partially enlarged view of Figure 1, and Figure 3 is an example of a vapor phase growth apparatus. A cross-sectional view of
Figures 4 and 5 are plan views of essential parts of conventional examples with different shapes, Figure 6 is a partially enlarged view of Figure 4, and Figure 7 is a line showing changes in the amount of reflected light as the susceptor rotates in the conventional example. Figure 8 is a sectional view of the main part of another embodiment of the present invention, Figure 9 is a partially enlarged view of Figure 8, and Figure 10 is a partially enlarged view of Figure 8.
The figure is a diagram showing changes in the amount of reflected light as the susceptor rotates in the present invention. 4... Susceptor, 16... Light source, 19... Detection means, 31, 36... Index, 32... Light, 33...
…reflected light.
Claims (1)
が微量になるか或いは無反射になる回転位置検出
用指標と、前記サセプタの外方にあつて前記サセ
プタの外周面に光を照射する光源と、前記サセプ
タの外方にあつて前記指標からの反射光量の差に
より前記指標が所定の回転位置に達したことを検
知する検知手段とからなる気相成長装置のサセプ
タ回転位置検出装置。 a rotational position detection index provided on the outer peripheral surface of the rotating susceptor so that reflected light becomes very small or non-reflective; a light source located outside the susceptor and irradiating light onto the outer peripheral surface of the susceptor; A susceptor rotational position detection device for a vapor phase growth apparatus, comprising a detection means located outside the susceptor and detecting that the index has reached a predetermined rotational position based on a difference in the amount of reflected light from the index.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083737U JPH0613258Y2 (en) | 1986-06-02 | 1986-06-02 | Susceptor rotation position detector for vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986083737U JPH0613258Y2 (en) | 1986-06-02 | 1986-06-02 | Susceptor rotation position detector for vapor phase growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62194759U true JPS62194759U (en) | 1987-12-11 |
| JPH0613258Y2 JPH0613258Y2 (en) | 1994-04-06 |
Family
ID=30937594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986083737U Expired - Lifetime JPH0613258Y2 (en) | 1986-06-02 | 1986-06-02 | Susceptor rotation position detector for vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0613258Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56111419A (en) * | 1980-02-08 | 1981-09-03 | Toshiba Corp | Optical position detector |
-
1986
- 1986-06-02 JP JP1986083737U patent/JPH0613258Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56111419A (en) * | 1980-02-08 | 1981-09-03 | Toshiba Corp | Optical position detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0613258Y2 (en) | 1994-04-06 |