JPS63124737U - - Google Patents
Info
- Publication number
- JPS63124737U JPS63124737U JP1521587U JP1521587U JPS63124737U JP S63124737 U JPS63124737 U JP S63124737U JP 1521587 U JP1521587 U JP 1521587U JP 1521587 U JP1521587 U JP 1521587U JP S63124737 U JPS63124737 U JP S63124737U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- coating device
- spin
- spin chuck
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1521587U JPH0521863Y2 (fi) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1521587U JPH0521863Y2 (fi) | 1987-02-04 | 1987-02-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63124737U true JPS63124737U (fi) | 1988-08-15 |
| JPH0521863Y2 JPH0521863Y2 (fi) | 1993-06-04 |
Family
ID=30805941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1521587U Expired - Lifetime JPH0521863Y2 (fi) | 1987-02-04 | 1987-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521863Y2 (fi) |
-
1987
- 1987-02-04 JP JP1521587U patent/JPH0521863Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521863Y2 (fi) | 1993-06-04 |