JPS62194740U - - Google Patents
Info
- Publication number
- JPS62194740U JPS62194740U JP8253186U JP8253186U JPS62194740U JP S62194740 U JPS62194740 U JP S62194740U JP 8253186 U JP8253186 U JP 8253186U JP 8253186 U JP8253186 U JP 8253186U JP S62194740 U JPS62194740 U JP S62194740U
- Authority
- JP
- Japan
- Prior art keywords
- light
- shutter
- ultraviolet
- seat assembly
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 2
- 239000013043 chemical agent Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Adhesives Or Adhesive Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253186U JPS62194740U (enExample) | 1986-06-02 | 1986-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8253186U JPS62194740U (enExample) | 1986-06-02 | 1986-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62194740U true JPS62194740U (enExample) | 1987-12-11 |
Family
ID=30935276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8253186U Pending JPS62194740U (enExample) | 1986-06-02 | 1986-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62194740U (enExample) |
-
1986
- 1986-06-02 JP JP8253186U patent/JPS62194740U/ja active Pending
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