JPS62194405A - 走査型光学式寸法測定装置 - Google Patents
走査型光学式寸法測定装置Info
- Publication number
- JPS62194405A JPS62194405A JP2539986A JP2539986A JPS62194405A JP S62194405 A JPS62194405 A JP S62194405A JP 2539986 A JP2539986 A JP 2539986A JP 2539986 A JP2539986 A JP 2539986A JP S62194405 A JPS62194405 A JP S62194405A
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- light beam
- dimension measuring
- measuring device
- optical dimension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 21
- 239000004065 semiconductor Substances 0.000 claims abstract description 29
- 238000005259 measurement Methods 0.000 claims abstract description 24
- 230000008859 change Effects 0.000 abstract description 6
- 230000000630 rising effect Effects 0.000 abstract description 3
- 230000002123 temporal effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000003708 edge detection Methods 0.000 description 5
- 239000013256 coordination polymer Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 206010061216 Infarction Diseases 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007574 infarction Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 235000015067 sauces Nutrition 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2539986A JPS62194405A (ja) | 1986-02-07 | 1986-02-07 | 走査型光学式寸法測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2539986A JPS62194405A (ja) | 1986-02-07 | 1986-02-07 | 走査型光学式寸法測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62194405A true JPS62194405A (ja) | 1987-08-26 |
| JPH0421123B2 JPH0421123B2 (https=) | 1992-04-08 |
Family
ID=12164822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2539986A Granted JPS62194405A (ja) | 1986-02-07 | 1986-02-07 | 走査型光学式寸法測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62194405A (https=) |
-
1986
- 1986-02-07 JP JP2539986A patent/JPS62194405A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0421123B2 (https=) | 1992-04-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |