JPS62192579A - Ceramic coating device by laser - Google Patents
Ceramic coating device by laserInfo
- Publication number
- JPS62192579A JPS62192579A JP61032862A JP3286286A JPS62192579A JP S62192579 A JPS62192579 A JP S62192579A JP 61032862 A JP61032862 A JP 61032862A JP 3286286 A JP3286286 A JP 3286286A JP S62192579 A JPS62192579 A JP S62192579A
- Authority
- JP
- Japan
- Prior art keywords
- face
- laser beam
- workpiece
- work
- ceramic member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005524 ceramic coating Methods 0.000 title claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 42
- 239000002245 particle Substances 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims abstract description 14
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 238000001704 evaporation Methods 0.000 abstract description 2
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 230000003595 spectral effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、シリンダー等の内周面へセラミックスの被
膜を形成（以下これ全セラミックスコーディングという
）する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an apparatus for forming a ceramic coating on the inner peripheral surface of a cylinder or the like (hereinafter referred to as "all-ceramic coating").
一般に、真空ポンプやロータリ圧縮機などのシリンダー
内周面は、シリンダー内に装着されるピストン等の部品
と摺動するために、アルミナや窒化ケイ素等のセラミッ
クス被膜で耐摩耗性等の特性向上を図っている。In general, the inner peripheral surface of cylinders such as vacuum pumps and rotary compressors is coated with ceramics such as alumina and silicon nitride to improve properties such as wear resistance in order to slide with parts such as pistons installed inside the cylinder. I'm trying.
このための従来装置としては第５図の構成図に示すもの
がある。図において、（１）はレーザー発振器で、この
場合はＣ０２レーザー発振器である。（２）はレーザー
ビーム、（３）はこのレーザービーム（２）の方向を変
えるペンドミラー（平面鏡） 、（４）はレーザービー
ム（２）を集光する集光レンズ、（５）は真空容ｉ、（
６）は真空容器（５）にレーザービーム（２）を取り入
れるウィンドーレンズ（透過窓）、（力は筒状の被加工
物、（７ａ’）はセラミックスコーティングが行なわれ
る被加工物（力の内周面、（８）は被加工物（７）全支
持する支持台、（９）はその外周面に歯車が形成され、
被加工物（力の外周面に固定される被加工物の回転用歯
車、（１１ｍはこの回転用歯車（９）とかみ合う歯車、
αυは支持台（８）に取シ付けられて歯車（１０に直結
されたモータ、α２は被加工物（７）の内周面（７ａ）
を加熱する棒状のヒータ、αりはアルミナや窒化ケイ素
等０円柱状のセラミックス部材で、図示しないモータ等
によって矢印（ｍ）の方向に回転される。A conventional device for this purpose is shown in the block diagram of FIG. In the figure, (1) is a laser oscillator, in this case a C02 laser oscillator. (2) is a laser beam, (3) is a pend mirror (plane mirror) that changes the direction of this laser beam (2), (4) is a condensing lens that focuses laser beam (2), and (5) is a vacuum volume i ,(
6) is a window lens (transmission window) that takes the laser beam (2) into the vacuum container (5), (force is a cylindrical workpiece), (7a') is a workpiece to be ceramic coated (force is The inner peripheral surface (8) is a support base that fully supports the workpiece (7), and (9) is a gear formed on its outer peripheral surface.
Workpiece (a rotational gear of the workpiece fixed to the outer peripheral surface of the force, (11m is a gear that meshes with this rotational gear (9),
αυ is a motor attached to the support stand (8) and directly connected to the gear (10), α2 is the inner peripheral surface (7a) of the workpiece (7)
The rod-shaped heater that heats the heater is a cylindrical ceramic member such as alumina or silicon nitride, and is rotated in the direction of the arrow (m) by a motor (not shown) or the like.
０４）はセラミックスの蒸発粒子、（１つはセラミック
ス部材（１３）’！ｒ加熱するヒータ、（ｔ６）はこの
ヒータａ！９を支持し、外部への熱伝達全防止する断熱
具である０次に上記の従来装置における動作について説
明する。まず、真空容器（５）内は図示しない真空ポン
プ等によって１０−４〜１Ｏ−６Ｔｏｒｒに真空引きさ
れる。次いで、ヒータαりおよびα２によってそれぞれ
セラミックス部材（１３の表面および被加工物（７）の
内周面を３００〜８００℃に加熱する。なお、セラミッ
クス部材住渇の表面加熱は、レーザービーム（２）の照
射による急激な温度上昇によってセラミックス部材α■
が割れるのを防止する几めである。ま之、被加工物（７
）の加熱は形成膜の付着強度を高めるためである。しか
るのち、セラミックス部材０国全矢印（ｍ）の方向に回
転させ、次いでレーザー発振器（１）全作動させてレー
ザービーム（２）を放射する。04) is a ceramic evaporation particle, (one is a heater that heats the ceramic member (13)'!r, and (t6) is a heat insulator that supports this heater a!9 and completely prevents heat transfer to the outside.0 Next, the operation of the above-mentioned conventional device will be explained. First, the inside of the vacuum container (5) is evacuated to 10-4 to 10-6 Torr by a vacuum pump (not shown), etc. Next, the ceramic The surface of the member (13) and the inner peripheral surface of the workpiece (7) are heated to 300 to 800°C.The surface heating of the ceramic member is performed by rapidly increasing the temperature by irradiating the laser beam (2). Part α■
This is a mechanism to prevent it from cracking. Mano, workpiece (7
) is to increase the adhesion strength of the formed film. Thereafter, the ceramic member 0 is rotated in the direction of the arrow (m), and then the laser oscillator (1) is fully activated to emit a laser beam (2).
レーザービーム（２）はペンドミラー（３）によって方
向金変え、次に集光レンズ（４）によってセラミックス
部材αりの外周面に集光される。この集光によってセラ
ミックスαりの外周面は加熱されて蒸発粒子Ｉが飛散し
、これが被加工物（７）の内周面（７ａ）に付着するう
さらに、この状態でコーティングを持続すると、コーテ
イング膜は内周面（７ａ）の−＝一部にしか形成されな
いので、モータαυ、モータ用歯車α１９回転用歯車（
９）によって被加工物（力全回転させ、内周面（７ａ）
の全面にわｔっでコーテイング膜が形成される。なお、
上記の構成に類似した装置としては昭和５９年７月５日
に特開昭５９−１１６３７３号として公開されたル−ザ
ー蒸着装置”があることを付言する。The direction of the laser beam (2) is changed by a pend mirror (3), and then the laser beam (2) is focused onto the outer peripheral surface of the ceramic member α by a condensing lens (4). The outer peripheral surface of the ceramic α is heated by this focused light, and the evaporated particles I are scattered, which adhere to the inner peripheral surface (7a) of the workpiece (7).Furthermore, if the coating is continued in this state, the coating Since the film is formed only on a part of the inner circumferential surface (7a), the motor αυ, motor gear α19 rotation gear (
9) to fully rotate the workpiece (inner peripheral surface (7a)
A coating film is formed all over the surface. In addition,
It should be added that an apparatus similar to the above-mentioned structure is the Loser Vapor Deposition Apparatus published on July 5, 1980 as Japanese Patent Application Laid-Open No. 116373/1983.
従来のレーザー光によるセラミックスコーティング装置
は以上のように構成されているので、細い筒の内面や、
深くそして長い筒には適用が困難である。″また、被加
工物（７）の回転は不可欠であることから、被加工物（
力の外周面や内周面（７ａ）の形状が複雑な場合は、そ
の取り付けや回転に工夫を要１２、装置としても複雑な
ものになるうさらに、セラミックスの蒸発粒子α句は膜
形成部分である内周面（７ａ）に対して垂直に衝突しな
いことから、この蒸発粒子（１４１の付着性が悪く、シ
かも蒸発粒子０．１）の飛散距離も異なることから形成
された膜厚は均一にならないなどの問題があつ九〇
この発明は上記のような問題点を解消するためになされ
たもので、簡単な機構によって従来はコーディングが不
可能であった形状の被加工物でも、セラミックスの被膜
形成が高品質で達成できるレーザーによるセラミックス
フーティング装置を得ることを目的としている。Conventional laser beam ceramics coating equipment is configured as described above, so it can coat the inner surface of a narrow cylinder,
It is difficult to apply to deep and long tubes. ``In addition, since rotation of the workpiece (7) is essential, the rotation of the workpiece (7) is essential.
If the shape of the outer circumferential surface or inner circumferential surface (7a) of the force is complicated, it is necessary to devise ways to attach and rotate them12, and the device will also be complicated. Furthermore, the evaporated particles α of ceramics may be difficult to form on the film forming part. Since the particles do not collide perpendicularly to the inner circumferential surface (7a), the scattering distance of the evaporated particles (141 has poor adhesion and may be 0.1), so the film thickness formed is There are problems such as non-uniformity.This invention was made to solve the problems mentioned above.With a simple mechanism, even workpieces with shapes that could not be coded in the past can be coated with ceramics. The purpose of the present invention is to obtain a laser-based ceramic footing device that can achieve high-quality film formation.
この発明に係るレーザーによるセラミックスコーティン
グ装置は、セラミックス部材を被加工物の内径よりも小
さな外径の円柱状とし、そして角錐状に加工されたセラ
ミックス部材の端面ｔ−被加工物の内側に挿入するとと
もに、このセラミックス部材を回転させ、次いで分光さ
れた２個のレーザービームがリング状に集光されたレー
ザービームを上記角錐状の端面に照射するとともに、被
加工物をその軸方向に移動するようにしたものであるう
〔作 用〕
この発明において、レーザービームＦ１２ｍに分光され
て角錐状に加工されたセラミックス部材の端面に照射さ
ｈることから、セラミックスの蒸発粒子は２点から放出
され、しかもこのセラミックス部材が回転していること
から、蒸発粒子は被加工物の内周面に垂直に衝突しなが
ら連続的に内周面全体にコーティングされる。したがっ
て、従来にない高品質なセラミックスコーティングが、
簡単な装置で非常に能率よく行うことが可能である。The laser-based ceramic coating apparatus according to the present invention includes forming a ceramic member into a columnar shape having an outer diameter smaller than the inner diameter of the workpiece, and inserting the end face t of the pyramid-shaped ceramic member into the inside of the workpiece. At the same time, this ceramic member is rotated, and then the two separated laser beams are focused into a ring shape and irradiate the pyramid-shaped end face, and the workpiece is moved in its axial direction. [Function] In this invention, since the laser beam F12m is split and irradiated onto the end face of the pyramid-shaped ceramic member, the evaporated particles of the ceramic are emitted from two points. Furthermore, since the ceramic member is rotating, the evaporated particles collide perpendicularly to the inner circumferential surface of the workpiece and continuously coat the entire inner circumferential surface. Therefore, unprecedented high quality ceramic coating
It can be carried out very efficiently using simple equipment.
第１図はこの発明の一実施例によるセラミックスコーテ
ィング装置の構成図である。図において第５図の従来装
置と同じ符号の部分はこねと同一または相当部分である
。（１３ａ）はセラミックス部材０渇の一端面に加工さ
れた角錐状端面、α′０はレーザービームｆ２）’ｅ２
個に分光するためのくさび状の分光ミラー、ａ椋は分光
されたレーザービーム（２）全集光する凹状の断面を有
するリング状の集光ミラーで、セラミックス部材α覆の
角錐状端面（１３ａ）の２点に照射するようにその方向
が調整されている。FIG. 1 is a block diagram of a ceramic coating apparatus according to an embodiment of the present invention. In the figure, parts with the same reference numerals as those in the conventional apparatus shown in FIG. 5 are the same or equivalent parts. (13a) is a pyramidal end face processed on one end face of a ceramic member 0, α'0 is a laser beam f2)'e2
A wedge-shaped spectroscopic mirror for separating the laser beam (2) into individual parts is a ring-shaped condensing mirror with a concave cross section that completely focuses the separated laser beam (2), and the pyramid-shaped end face (13a) of the ceramic member α cover. Its direction is adjusted so that it illuminates two points.
ｆｉ９はセラミックス部材ａ３全固定する固定具、（イ
）は固定具（１１ヲ介してセラミックス部材α３を矢印
（ｎ）方向に回転させるモータ、（２１）はその上面に
支持台（８）が取付けられたテーブル、（２１ａ）はこ
のテーブル（２１）の一方の側面に加工された歯部、（
２２）はこの歯部（２１ａ）とかみ合う歯車、（２３）
は歯車（２２） ’ｒ回転させてテーブル（２１） ？
矢印（ａ）方向に移動させるモータ、（２４）はテーブ
ル（２１） ｅ保持する保持台である。なお、これらテ
ーブル（２１）の移動ｔ′Ａ構の詳細を第２図に示す。fi9 is a fixture that completely fixes ceramic member a3, (a) is a motor that rotates ceramic member α3 in the direction of arrow (n) via fixture (11), and (21) is a support base (8) attached to its upper surface. The table (21a) is a toothed part (21a) machined on one side of the table (21).
22) is a gear that meshes with this tooth portion (21a), (23)
Is the gear (22) 'r rotate the table (21)?
A motor that moves in the direction of arrow (a), and (24) a holding stand that holds the table (21) e. The details of the movement t'A structure of these tables (21) are shown in FIG.
次に本発明の一実施例における動作について説明する。Next, the operation in one embodiment of the present invention will be explained.
まず、真空容器（５）内は図示しない真空ポンプ等によ
って１０−４〜１０−’ Ｔｏｒｒに真°空引きされる
。次いで、環状ヒータ（１２１）および（１５１）によ
ってそれぞれ被加工物（７）およびセラミックス部材α
：ｌ−１００〜８００℃に加熱する。しかるのち、セラ
ミックス部材α国ヲ矢印（ｎ）方向に回転させ、次いで
レーザー発振器（１）’を作動させてレーザービーム゛
（２）全放射するっここで、レーザービーム（２）は分
光ミラーαηによって２Ｎに分光され、さらに集光ミラ
ー特によってその集光と方向が調整されてセ 。First, the inside of the vacuum container (5) is evacuated to 10-4 to 10-' Torr using a vacuum pump (not shown) or the like. Next, the workpiece (7) and the ceramic member α are heated by the annular heaters (121) and (151), respectively.
:l-Heat to 100-800°C. After that, the ceramic member α is rotated in the direction of the arrow (n), and then the laser oscillator (1)' is activated to emit the entire laser beam (2). The light is separated into 2N beams by the light beam, and its focus and direction are adjusted by a focusing mirror.
ラミックス部材α■の角錐状端面（１３ａ）の２点に照
射される。例えば、第６図に示すような角錐面（１３１
） 、 （１３２）の位置にレーザービーム（２）が照
射された場合、蒸発粒子Ｉは上、下の方向に飛散する。Two points on the pyramidal end face (13a) of the Lamix member α■ are irradiated. For example, a pyramidal surface (131
), (132) is irradiated with the laser beam (2), the evaporated particles I scatter upward and downward.
また第４図に示す位置（１３３） 、 （１３４）の場
合、蒸発粒子α４は上方が右側に、下方が左側に飛散す
る。これら蒸発粒子α４の飛散方向の移動は、セラミッ
クス部材α９の回転によってなされるもので連続的に変
化する。この点が本発明の特徴であシ、そして蒸発粒子
ａ４は被加工物（力の内周面（７ａ）に対して垂直に衝
突するように角錐状の頂角が設計されていることから、
蒸発粒子Ｉの付着性も良く、また、膜厚の均一なコーテ
ィングが可能となるうさらに２点からの同時コーティン
グとなることがら、能率的な被膜形成が達成できる。ま
た、被加工物（７）は回転しないことから、複雑な形状
の被加工物でもセラミックスのコーティングができ、し
かもセラミックス部材α騰における角錐状の端面（１３
ａ） ｋ被加工物（力の内側に挿入してコーティングを
することから、従来にない細い穴の内周面へも適用でき
るうさらに深い長さの筒に対してにモータ（２３） 、
歯車（２２） 、歯部（２１ａ）によって被加工物（７
）ヲその軸方向に移動できることから十分対応できるも
のである。Further, in the case of the positions (133) and (134) shown in FIG. 4, the upper part of the evaporated particles α4 scatters to the right, and the lower part scatters to the left. The movement of these evaporated particles α4 in the scattering direction is caused by the rotation of the ceramic member α9, and changes continuously. This point is a feature of the present invention, and since the apex angle of the pyramid shape is designed so that the evaporated particles a4 collide perpendicularly to the workpiece (the inner circumferential surface (7a) of the force),
The adhesion of the evaporated particles I is good, and since coating with a uniform thickness is possible and simultaneous coating is performed from two points, efficient film formation can be achieved. In addition, since the workpiece (7) does not rotate, it is possible to coat even a workpiece with a complicated shape with ceramics, and the pyramid-shaped end face (13) of the ceramic member α rises.
a) The motor (23) for a cylinder with a deeper length, which can be applied to the inner circumferential surface of a narrower hole than ever before, since it is inserted inside the workpiece and coated.
The gear (22) and the workpiece (7) are rotated by the teeth (21a).
) can be moved in the axial direction.
なお、上記実施例では、Ｃ０２レーザーを使用したが、
他のルビーレーザーやＹＡＧレーザーなどの工業用レー
ザーであれば同等の効果を奏することができる。さらに
、レーザービームはくさび状の分光ミラーによって２個
に分割したが、これに限らず２台のレーザー発振器を用
いてもよく、まｔ１被加工物の軸方向における移動は歯
車の組み合わせによって行なったが、これも他の空圧シ
リンダーなどいずれの手段でもよい。In addition, in the above example, a C02 laser was used, but
Other industrial lasers such as ruby lasers and YAG lasers can produce similar effects. Furthermore, although the laser beam was split into two by a wedge-shaped spectroscopic mirror, the invention is not limited to this, and two laser oscillators may be used, and the movement of the t1 workpiece in the axial direction was performed by a combination of gears. However, any means such as another pneumatic cylinder may also be used.
以上のようにこの発明によれば、真空容器内でセラミッ
クス部材にレーザービームを集光照射し、セラミックス
の粒子を蒸発させて真空ポンプ等のシリンダー内周面へ
被膜形成するものにおいて、セラミックス部材を被加工
物の内径よυも小さな外径の円柱状とし、角錐状に加工
された前記セラミックス部材の一端面を被加工物の内側
に挿入するとともに、このセラミックス部材を回転させ
た後、分光され７’ｃ ２ ＩＩ！のレーザービームを
前記角錐状の端面に照射し、さらに被加工物をその軸方
向に移動するように構成したので、従来困難であった細
い筒や長い筒の内周面への被膜形成が非常に簡単な装置
によって容易にでき、しかも複雑な形状の被加工物でも
十分適用できる。さらに２点からの同時コーティングと
なることから能率的な被膜形成が達成できるので、生産
の合理化および原価の低減に寄与できるものである。As described above, according to the present invention, a ceramic member is irradiated with a focused laser beam in a vacuum container to evaporate ceramic particles to form a coating on the inner peripheral surface of a cylinder of a vacuum pump or the like. A cylindrical shape with an outer diameter smaller than the inner diameter υ of the workpiece is inserted, one end surface of the pyramid-shaped ceramic member is inserted inside the workpiece, the ceramic member is rotated, and then spectroscopy is performed. 7'c 2 II! The laser beam is irradiated onto the end face of the pyramid, and the workpiece is moved in the axial direction, making it extremely difficult to form a coating on the inner circumferential surface of thin or long cylinders, which was previously difficult. It can be easily performed using a simple device, and can be applied even to workpieces with complex shapes. Furthermore, since coating is performed from two points simultaneously, efficient film formation can be achieved, contributing to rationalization of production and cost reduction.
第１図はこの発明の一実施例によるセラミックスコーデ
ィング装置の構成図、第２図はこの発明の一実施例で用
いた被加工物の移動機構を示す要部の平面図、第６図、
第４図はこの発明の一実施例で用いた蒸発粒子の飛散方
向を示す説明図、第５図は従来のレーザーによるセラミ
ックスコーティング装置を示すＮｉ成因である。
図中、（１）はレーザー発振器、（２）はレーザービー
ム、（５）は真空容器、（７）は被加工物、（１’３
、 （１５はヒータ、（ｔ：ｉはセラミックス部材、（
１３ａ）はその角錐状端面、（１４１ｉｔｉ発粒子、ａ
ηは分光ミラー、α梯は集光ミラーである。
なお、各図中同一符号は同一または相当部分を示す。
代理人 弁理士 佐 藤 正 年
第３図
第４図FIG. 1 is a block diagram of a ceramics coating apparatus according to an embodiment of the present invention, FIG. 2 is a plan view of essential parts showing a movement mechanism for a workpiece used in an embodiment of the present invention, and FIG.
FIG. 4 is an explanatory diagram showing the scattering direction of evaporated particles used in an embodiment of the present invention, and FIG. 5 is a diagram showing the Ni source of a conventional laser-based ceramic coating apparatus. In the figure, (1) is a laser oscillator, (2) is a laser beam, (5) is a vacuum container, (7) is a workpiece, (1'3
, (15 is a heater, (t:i is a ceramic member, (
13a) is its pyramidal end face, (141iti particle emission, a
η is a spectroscopic mirror, and α ladder is a condensing mirror. Note that the same reference numerals in each figure indicate the same or corresponding parts. Agent: Patent Attorney Tadashi Sato Figure 3 Figure 4
Claims (1)
に集光照射し、セラミックスの粒子を蒸発させて筒状の
被加工物内周面に被膜を形成する装置において、前記セ
ラミックス部材を被加工物の内径よりも小さな外径の円
柱状とし、角錐状に加工されたセラミックス部材の端面
部分を被加工物の内側に挿入するとともにこれを回転さ
せ、２組に分光されたレーザービームを上記角錐状の端
面に照射するとともに被加工物をその軸方向に移動する
ように構成したレーザーによるセラミックスコーティン
グ装置。(1) In an apparatus that irradiates a ceramic member with a focused laser beam in a vacuum container to evaporate ceramic particles and form a coating on the inner peripheral surface of a cylindrical workpiece, the ceramic member is attached to the workpiece. The end face of a ceramic member, which has a cylindrical shape with an outer diameter smaller than the inner diameter and is processed into a pyramid shape, is inserted inside the workpiece and rotated, and the laser beam split into two sets is transmitted into the pyramid shape. A ceramic coating device that uses a laser to irradiate the end face and move the workpiece in its axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61032862A JPS62192579A (en) | 1986-02-19 | 1986-02-19 | Ceramic coating device by laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61032862A JPS62192579A (en) | 1986-02-19 | 1986-02-19 | Ceramic coating device by laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192579A true JPS62192579A (en) | 1987-08-24 |
Family
ID=12370658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61032862A Pending JPS62192579A (en) | 1986-02-19 | 1986-02-19 | Ceramic coating device by laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192579A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01159367A (en) * | 1987-12-15 | 1989-06-22 | Mitsubishi Electric Corp | Formation of oxide film utilizing laser |
| JPH01219155A (en) * | 1988-02-25 | 1989-09-01 | Mitsubishi Electric Corp | Laser vapor deposition apparatus |
| EP0931851A1 (en) * | 1998-01-22 | 1999-07-28 | DaimlerChrysler AG | Method for obtaining functional metallic, ceramic or ceramic/metallic layers on the internal wall of hollow bodies |
-
1986
- 1986-02-19 JP JP61032862A patent/JPS62192579A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01159367A (en) * | 1987-12-15 | 1989-06-22 | Mitsubishi Electric Corp | Formation of oxide film utilizing laser |
| JPH01219155A (en) * | 1988-02-25 | 1989-09-01 | Mitsubishi Electric Corp | Laser vapor deposition apparatus |
| EP0931851A1 (en) * | 1998-01-22 | 1999-07-28 | DaimlerChrysler AG | Method for obtaining functional metallic, ceramic or ceramic/metallic layers on the internal wall of hollow bodies |
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