JPS62190335U - - Google Patents

Info

Publication number
JPS62190335U
JPS62190335U JP7695586U JP7695586U JPS62190335U JP S62190335 U JPS62190335 U JP S62190335U JP 7695586 U JP7695586 U JP 7695586U JP 7695586 U JP7695586 U JP 7695586U JP S62190335 U JPS62190335 U JP S62190335U
Authority
JP
Japan
Prior art keywords
gas supply
supply nozzle
large number
reaction container
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7695586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7695586U priority Critical patent/JPS62190335U/ja
Publication of JPS62190335U publication Critical patent/JPS62190335U/ja
Pending legal-status Critical Current

Links

JP7695586U 1986-05-23 1986-05-23 Pending JPS62190335U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7695586U JPS62190335U (US20090163788A1-20090625-C00002.png) 1986-05-23 1986-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7695586U JPS62190335U (US20090163788A1-20090625-C00002.png) 1986-05-23 1986-05-23

Publications (1)

Publication Number Publication Date
JPS62190335U true JPS62190335U (US20090163788A1-20090625-C00002.png) 1987-12-03

Family

ID=30924509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7695586U Pending JPS62190335U (US20090163788A1-20090625-C00002.png) 1986-05-23 1986-05-23

Country Status (1)

Country Link
JP (1) JPS62190335U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH044736U (US20090163788A1-20090625-C00002.png) * 1990-04-26 1992-01-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH044736U (US20090163788A1-20090625-C00002.png) * 1990-04-26 1992-01-16

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