JPS62190334U - - Google Patents
Info
- Publication number
- JPS62190334U JPS62190334U JP7695686U JP7695686U JPS62190334U JP S62190334 U JPS62190334 U JP S62190334U JP 7695686 U JP7695686 U JP 7695686U JP 7695686 U JP7695686 U JP 7695686U JP S62190334 U JPS62190334 U JP S62190334U
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- compound
- gas
- vacuum chamber
- atoms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000007935 neutral effect Effects 0.000 claims description 2
- 238000004381 surface treatment Methods 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 5
- 238000001816 cooling Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000002826 coolant Substances 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7695686U JPS62190334U (nl) | 1986-05-23 | 1986-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7695686U JPS62190334U (nl) | 1986-05-23 | 1986-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190334U true JPS62190334U (nl) | 1987-12-03 |
Family
ID=30924511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7695686U Pending JPS62190334U (nl) | 1986-05-23 | 1986-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190334U (nl) |
-
1986
- 1986-05-23 JP JP7695686U patent/JPS62190334U/ja active Pending
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