JPS62189650U - - Google Patents
Info
- Publication number
- JPS62189650U JPS62189650U JP5756486U JP5756486U JPS62189650U JP S62189650 U JPS62189650 U JP S62189650U JP 5756486 U JP5756486 U JP 5756486U JP 5756486 U JP5756486 U JP 5756486U JP S62189650 U JPS62189650 U JP S62189650U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- measured
- defect
- optical inspection
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756486U JPS62189650U (de) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756486U JPS62189650U (de) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62189650U true JPS62189650U (de) | 1987-12-02 |
Family
ID=30887385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5756486U Pending JPS62189650U (de) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62189650U (de) |
-
1986
- 1986-04-18 JP JP5756486U patent/JPS62189650U/ja active Pending
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