JPS62186427U - - Google Patents

Info

Publication number
JPS62186427U
JPS62186427U JP7676586U JP7676586U JPS62186427U JP S62186427 U JPS62186427 U JP S62186427U JP 7676586 U JP7676586 U JP 7676586U JP 7676586 U JP7676586 U JP 7676586U JP S62186427 U JPS62186427 U JP S62186427U
Authority
JP
Japan
Prior art keywords
substrate
brush
cleaning device
holds
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7676586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7676586U priority Critical patent/JPS62186427U/ja
Publication of JPS62186427U publication Critical patent/JPS62186427U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP7676586U 1986-05-20 1986-05-20 Pending JPS62186427U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7676586U JPS62186427U (US20090163788A1-20090625-C00002.png) 1986-05-20 1986-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7676586U JPS62186427U (US20090163788A1-20090625-C00002.png) 1986-05-20 1986-05-20

Publications (1)

Publication Number Publication Date
JPS62186427U true JPS62186427U (US20090163788A1-20090625-C00002.png) 1987-11-27

Family

ID=30924154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7676586U Pending JPS62186427U (US20090163788A1-20090625-C00002.png) 1986-05-20 1986-05-20

Country Status (1)

Country Link
JP (1) JPS62186427U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0352228A (ja) * 1989-07-20 1991-03-06 Tokyo Electron Ltd 洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0352228A (ja) * 1989-07-20 1991-03-06 Tokyo Electron Ltd 洗浄装置

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