JPS62186425U - - Google Patents
Info
- Publication number
- JPS62186425U JPS62186425U JP1986073881U JP7388186U JPS62186425U JP S62186425 U JPS62186425 U JP S62186425U JP 1986073881 U JP1986073881 U JP 1986073881U JP 7388186 U JP7388186 U JP 7388186U JP S62186425 U JPS62186425 U JP S62186425U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- electron
- shielding ring
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000000609 electron-beam lithography Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000000428 dust Substances 0.000 claims 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073881U JPS62186425U (enExample) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073881U JPS62186425U (enExample) | 1986-05-19 | 1986-05-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186425U true JPS62186425U (enExample) | 1987-11-27 |
Family
ID=30918601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986073881U Pending JPS62186425U (enExample) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186425U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006019280A (ja) * | 2004-07-01 | 2006-01-19 | Fei Co | サンプルを真空排気するための装置 |
-
1986
- 1986-05-19 JP JP1986073881U patent/JPS62186425U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006019280A (ja) * | 2004-07-01 | 2006-01-19 | Fei Co | サンプルを真空排気するための装置 |
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