JPS62184191U - - Google Patents

Info

Publication number
JPS62184191U
JPS62184191U JP1986072565U JP7256586U JPS62184191U JP S62184191 U JPS62184191 U JP S62184191U JP 1986072565 U JP1986072565 U JP 1986072565U JP 7256586 U JP7256586 U JP 7256586U JP S62184191 U JPS62184191 U JP S62184191U
Authority
JP
Japan
Prior art keywords
rotating body
sphere
molecular pump
turbo
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986072565U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0455276Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986072565U priority Critical patent/JPH0455276Y2/ja
Priority to DE19873716221 priority patent/DE3716221A1/de
Publication of JPS62184191U publication Critical patent/JPS62184191U/ja
Application granted granted Critical
Publication of JPH0455276Y2 publication Critical patent/JPH0455276Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP1986072565U 1986-05-16 1986-05-16 Expired JPH0455276Y2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (de) 1986-05-16 1986-05-16
DE19873716221 DE3716221A1 (de) 1986-05-16 1987-05-14 Turbomolekularpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (de) 1986-05-16 1986-05-16

Publications (2)

Publication Number Publication Date
JPS62184191U true JPS62184191U (de) 1987-11-21
JPH0455276Y2 JPH0455276Y2 (de) 1992-12-25

Family

ID=13493013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986072565U Expired JPH0455276Y2 (de) 1986-05-16 1986-05-16

Country Status (2)

Country Link
JP (1) JPH0455276Y2 (de)
DE (1) DE3716221A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (ja) * 2003-03-03 2004-09-16 Tadahiro Ohmi 真空ポンプ

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
DE19827606A1 (de) * 1998-06-20 1999-12-23 Schlafhorst & Co W Lageranordnung für eine Offenend-Spinnvorrichtung
DE502004003752D1 (de) * 2004-01-29 2007-06-21 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2005344610A (ja) * 2004-06-03 2005-12-15 Boc Edwards Kk 真空排気装置
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (de) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd タ−ボ分子ポンプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1475765A (fr) * 1966-01-31 1967-04-07 Snecma Perfectionnements aux appareils à arbre vertical tournant à grande vitesse
DE2524061C3 (de) * 1975-05-30 1980-04-30 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbovakuumpumpe mit Fanglager

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (de) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (ja) * 1983-03-07 1984-09-13 Hitachi Ltd タ−ボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (ja) * 2003-03-03 2004-09-16 Tadahiro Ohmi 真空ポンプ

Also Published As

Publication number Publication date
DE3716221C2 (de) 1990-05-10
DE3716221A1 (de) 1987-11-26
JPH0455276Y2 (de) 1992-12-25

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