JPS62184191U - - Google Patents

Info

Publication number
JPS62184191U
JPS62184191U JP1986072565U JP7256586U JPS62184191U JP S62184191 U JPS62184191 U JP S62184191U JP 1986072565 U JP1986072565 U JP 1986072565U JP 7256586 U JP7256586 U JP 7256586U JP S62184191 U JPS62184191 U JP S62184191U
Authority
JP
Japan
Prior art keywords
rotating body
sphere
molecular pump
turbo
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986072565U
Other languages
Japanese (ja)
Other versions
JPH0455276Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986072565U priority Critical patent/JPH0455276Y2/ja
Priority to DE19873716221 priority patent/DE3716221A1/en
Publication of JPS62184191U publication Critical patent/JPS62184191U/ja
Application granted granted Critical
Publication of JPH0455276Y2 publication Critical patent/JPH0455276Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図は従来のターボ
分子ポンプを示す縦断側面図である。 １，１ａ……回転体、２ａ，２ｂ……ケーシン
グ、３，４，５……ガスベアリング、１０ａ，１
０ｂ……球体、８，１２……球体支持部材。 FIG. 1 is a longitudinal sectional side view showing an embodiment of a turbo-molecular pump according to the present invention, and FIG. 2 is a longitudinal sectional side view showing a conventional turbo-molecular pump. 1, 1a... Rotating body, 2a, 2b... Casing, 3, 4, 5... Gas bearing, 10a, 1
0b... Sphere, 8, 12... Sphere support member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転体をガスベアリングにより回転可能に支持
したターボ分子ポンプにおいて、前記回転体の上
下端部に常時非接触で対向する球体と同球体を回
転可能に支持する球体支持部材とよりなる危急軸
受を前記回転体を取り囲むケーシング側に取付け
たことを特徴とするターボ分子ポンプ。 In a turbo-molecular pump in which a rotating body is rotatably supported by a gas bearing, the above-mentioned emergency bearing is comprised of a sphere that faces the upper and lower ends of the rotating body in a non-contact manner and a sphere support member that rotatably supports the sphere. A turbo molecular pump characterized by being attached to the casing that surrounds the rotating body.
JP1986072565U 1986-05-16 1986-05-16 Expired JPH0455276Y2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (en) 1986-05-16 1986-05-16
DE19873716221 DE3716221A1 (en) 1986-05-16 1987-05-14 Turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986072565U JPH0455276Y2 (en) 1986-05-16 1986-05-16

Publications (2)

Publication Number Publication Date
JPS62184191U true JPS62184191U (en) 1987-11-21
JPH0455276Y2 JPH0455276Y2 (en) 1992-12-25

Family

ID=13493013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986072565U Expired JPH0455276Y2 (en) 1986-05-16 1986-05-16

Country Status (2)

Country Link
JP (1) JPH0455276Y2 (en)
DE (1) DE3716221A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (en) * 2003-03-03 2004-09-16 Tadahiro Ohmi Vacuum pump

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2634829B1 (en) * 1988-07-27 1990-09-14 Cit Alcatel VACUUM PUMP
DE19827606A1 (en) * 1998-06-20 1999-12-23 Schlafhorst & Co W Non-contact bearing for open-end spinning rotor shaft with magnetic axial bearing
ATE362051T1 (en) * 2004-01-29 2007-06-15 Pfeiffer Vacuum Gmbh GAS FRICTION PUMP
JP2005344610A (en) * 2004-06-03 2005-12-15 Boc Edwards Kk Evacuation device
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (en) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (en) * 1983-03-07 1984-09-13 Hitachi Ltd Molecular turbopump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1475765A (en) * 1966-01-31 1967-04-07 Snecma Improvements to devices with vertical shaft rotating at high speed
DE2524061C3 (en) * 1975-05-30 1980-04-30 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Magnetically mounted turbo vacuum pump with safety bearing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5191008A (en) * 1975-02-07 1976-08-10
JPS5612095A (en) * 1979-05-21 1981-02-05 Cambridge Thermionic Corp Turbo molecular vacuum pump
JPS59162396A (en) * 1983-03-07 1984-09-13 Hitachi Ltd Molecular turbopump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004079197A1 (en) * 2003-03-03 2004-09-16 Tadahiro Ohmi Vacuum pump

Also Published As

Publication number Publication date
DE3716221A1 (en) 1987-11-26
JPH0455276Y2 (en) 1992-12-25
DE3716221C2 (en) 1990-05-10

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