JPS62183090U - - Google Patents

Info

Publication number
JPS62183090U
JPS62183090U JP7066586U JP7066586U JPS62183090U JP S62183090 U JPS62183090 U JP S62183090U JP 7066586 U JP7066586 U JP 7066586U JP 7066586 U JP7066586 U JP 7066586U JP S62183090 U JPS62183090 U JP S62183090U
Authority
JP
Japan
Prior art keywords
casing
vacuum pump
water
ring vacuum
water ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7066586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7066586U priority Critical patent/JPS62183090U/ja
Publication of JPS62183090U publication Critical patent/JPS62183090U/ja
Pending legal-status Critical Current

Links

JP7066586U 1986-05-13 1986-05-13 Pending JPS62183090U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7066586U JPS62183090U (enrdf_load_stackoverflow) 1986-05-13 1986-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7066586U JPS62183090U (enrdf_load_stackoverflow) 1986-05-13 1986-05-13

Publications (1)

Publication Number Publication Date
JPS62183090U true JPS62183090U (enrdf_load_stackoverflow) 1987-11-20

Family

ID=30912507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7066586U Pending JPS62183090U (enrdf_load_stackoverflow) 1986-05-13 1986-05-13

Country Status (1)

Country Link
JP (1) JPS62183090U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437690A (en) * 1977-08-30 1979-03-20 Nec Corp Manufacture for semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437690A (en) * 1977-08-30 1979-03-20 Nec Corp Manufacture for semiconductor device

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