JPS62183021A - Magnetic recording medium having protective layer - Google Patents

Magnetic recording medium having protective layer

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Publication number
JPS62183021A
JPS62183021A JP2297186A JP2297186A JPS62183021A JP S62183021 A JPS62183021 A JP S62183021A JP 2297186 A JP2297186 A JP 2297186A JP 2297186 A JP2297186 A JP 2297186A JP S62183021 A JPS62183021 A JP S62183021A
Authority
JP
Japan
Prior art keywords
magnetic
thin
layer
magnetic recording
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2297186A
Other languages
Japanese (ja)
Inventor
Osamu Shinoura
治 篠浦
Shigeo Kurose
茂夫 黒瀬
Tomotaka Saito
斉藤 友敬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2297186A priority Critical patent/JPS62183021A/en
Publication of JPS62183021A publication Critical patent/JPS62183021A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To simplify a process for production by providing a thin carbon film by a sputtering method via a thin chromium film layer formed by a wet chromate treatment onto a magnetic layer consisting of a thin metallic film. CONSTITUTION:The magnetic layer consisting of a thin ferromagnetic metallic film is provided on a nonmagnetic base and a protective layer consisting of the thin carbon film is provided via an underlying layer consisting of the thin chromium film layer. The thin chromium film layer is formed to a uniform and defectless thin film of preferably <=50Angstrom by the wet chromate treatment and the thin carbon film is formed by a sputtering method. The sputtering method is used only for the formation of the thin carbon film according to the above-mentioned constitution and therefore, the process for production is simplified. In addition, the spacing loss between the magnetic layer and magnetic head is decreased.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、保護層を有する磁気記録媒体に関し、特に磁
性層が強磁性体金属薄膜から成り且つこの□磁性層上に
クマム薄展から成る下地層を介してカーボンm膜から成
る保譲層が設けられた磁気記録媒体に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic recording medium having a protective layer, and in particular, the magnetic layer is made of a ferromagnetic metal thin film, and the magnetic layer is made of Kumam thin film spread on the magnetic layer. The present invention relates to a magnetic recording medium provided with a retention layer made of a carbon m film with an underlayer interposed therebetween.

〔従来の技術〕[Conventional technology]

磁気記憶装置の大容量化に伴い、それに使用される磁気
記録媒体にはますます高記録密度特性と高信頼性が要求
されている。従来の磁気記録媒体においては、一般的に
y−F・、03等の磁性粉を樹脂バインダーに分散させ
たものを非磁性支持体上に塗布してなる塗布型磁気記録
媒体が使用されてきたが、近年の高記録密度化に対応し
て、蒸着法、めっき法、スパッタ法等によって磁性金属
′f1g膜を非磁性支持体上に形成した金jiI薄膜型
磁気記録媒体が注目されてきている。
As the capacity of magnetic storage devices increases, the magnetic recording media used therein are required to have increasingly high recording density characteristics and high reliability. Conventional magnetic recording media have generally been coated magnetic recording media in which magnetic powder such as y-F.03 is dispersed in a resin binder and coated on a non-magnetic support. However, in response to the recent trend toward higher recording densities, attention has been focused on gold-jiI thin-film magnetic recording media in which a magnetic metal film is formed on a non-magnetic support by vapor deposition, plating, sputtering, etc. .

この金属薄膜型磁気記録媒体においては、磁性層を薄膜
化することが可能であり、また磁性層中に非磁性である
樹脂バインダーを含まないため高磁束密度化が可能とな
り、その結果高記録密度が可能となる。しかしながら、
この種の磁気記録媒体においては、漉布型磁気記録媒体
に比して、磁気記録媒体と磁気ヘッドとの摺動接触によ
り磁性層が破壊されるという問題が生じ易く、従って磁
気ヘッドの摺動接触に対して充分な耐摩耗性を持たせる
ために磁性層表面に処理を施すことが重要な1lI11
1となっている。
In this metal thin film type magnetic recording medium, it is possible to make the magnetic layer thinner, and since the magnetic layer does not contain a non-magnetic resin binder, it is possible to increase the magnetic flux density, resulting in a high recording density. becomes possible. however,
In this type of magnetic recording medium, the problem that the magnetic layer is easily destroyed due to sliding contact between the magnetic recording medium and the magnetic head is more likely to occur than in cloth-type magnetic recording media. It is important to treat the surface of the magnetic layer in order to have sufficient wear resistance against contact1lI11
It is 1.

この表面処理としては、磁性層上にカーボン薄膜から成
る保護層を真空法によって形成せしめるという手段がよ
く知られており(特公昭54−55521号)、且つ有
効に使用されている。
As for this surface treatment, a method of forming a protective layer made of a thin carbon film on the magnetic layer by a vacuum method is well known (Japanese Patent Publication No. 55521/1982) and has been effectively used.

ところで、上記手段を利用した磁気記録媒体においては
、金B4薄膜から成る磁性層上にカーボン薄膜から成る
保護層を形成せしめる場合にこれら両層間の密着性が悪
いため、保護層がその本来の目的を達し得ないという問
題点があった。この対策として前記二層の間にクロム薄
膜から成る下地層をスパッタ法によって形成せしめると
いう手段を試みたところ、これによって特に耐久走行性
の点で効果が得られることが確認された。
By the way, in a magnetic recording medium using the above method, when a protective layer made of a carbon thin film is formed on a magnetic layer made of a gold B4 thin film, the adhesion between these two layers is poor, so that the protective layer does not serve its original purpose. The problem was that it was not possible to achieve this. As a countermeasure to this problem, an attempt was made to form a base layer made of a thin chromium film between the two layers by sputtering, and it was confirmed that this method was particularly effective in terms of running durability.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、この下地層となるり四ム薄膜がスパッタ
法によって形成せしめられた磁気記録媒体においては、
クロム薄膜形成の際とそれに続くカーボン薄膜形成の際
とにおいてそれぞれ異なる雰題気条件か必要であるため
その製造工程が複雑になり、さらにそれに伴ってスパッ
タMlffの構造も複雑にしなければならないという問
題点があった。
However, in magnetic recording media in which a four-layer thin film is formed as the underlayer by sputtering,
The problem is that different atmospheric conditions are required for the formation of the chromium thin film and the subsequent carbon thin film, which complicates the manufacturing process, and as a result, the structure of the sputtered Mlff must also become complicated. There was a point.

また、磁気ヘッドを媒体と接触せしめながら記録する記
録方式に使用される磁気記録媒体にあっては、磁性層と
磁気ヘッドとの間のスペーシング・pスの11題から、
製造する際にり四ム薄f Wiの)51さをできる限り
薄くシなければならないが、一方、クロム薄膜をスパッ
タ法によって形成せしめた場合の磁気記録媒体において
は、該クロム薄膜の厚さが50λ以上でなければ耐候性
が不充分であり、即ちカーボン71[の保勘層としての
1m Wiが不充分であるという問題点があった。
In addition, for magnetic recording media used in a recording method that records while the magnetic head is in contact with the medium, from the 11 problems of spacing between the magnetic layer and the magnetic head,
During manufacturing, the thickness of the chromium thin film must be made as thin as possible, but on the other hand, in magnetic recording media where the chromium thin film is formed by sputtering, If it is not less than 50λ, the weather resistance is insufficient, that is, there is a problem that 1 m Wi as a protective layer of carbon 71 is insufficient.

本発明は上記の点を鑑みてなされたものであり、金m薄
膜から成る磁性層とカーボン薄膜から成る保護層との間
に介在するクロム薄膜層が、より簡略化された装置・工
程によって、より薄く形成せしめられた磁気記録媒体を
提供することを目的とする。
The present invention has been made in view of the above points, and the chromium thin film layer interposed between the magnetic layer made of a gold thin film and the protective layer made of a carbon thin film can be formed by using a simpler device and process. An object of the present invention is to provide a magnetic recording medium that can be made thinner.

〔発明の詳細な説明〕[Detailed description of the invention]

本発明の磁気記録媒体は、非磁性型持体上に強磁性体金
属薄膜から成る磁性層が設けられ、この磁性層上にこの
金属薄膜を湿式クロメート処理することによってり四ム
薄膜から成る層が形成され、さらにこのり四ム薄膜層上
にスパッタ法によってカーボン薄膜から成る保護層が形
成されて成るものである。
In the magnetic recording medium of the present invention, a magnetic layer made of a ferromagnetic metal thin film is provided on a non-magnetic carrier, and a layer made of a four-layer thin film is formed by wet chromating the metal thin film on the magnetic layer. is formed, and a protective layer made of a carbon thin film is further formed on the four-layer thin film layer by sputtering.

湿式り田メート処理は、全屈の表面処理として広く利用
されており、磁気記録媒体においてもその使用が試みら
れていた(特開昭51−47401号)。この湿式クロ
メート処理をすると、処理された金H!、fWの極表面
が溶け、そこにクロム層が形成されるために、極めて均
一で欠陥のない薄い膜が得られる。この膜厚は5oÅ以
下、一般的に10人程度と考えられる。しがしながら、
この出願に記載された湿式クロメート処理をした磁気記
録媒体は、主として耐候性の点で改良されただけで、記
録媒体としては不充分であった。
Wet Rita Mate treatment is widely used as a surface treatment for full bending, and its use was also attempted for magnetic recording media (Japanese Patent Application Laid-open No. 47401/1983). When this wet chromate treatment is performed, the treated gold H! , fW is melted and a chromium layer is formed there, resulting in an extremely uniform and defect-free thin film. This film thickness is 5oA or less, and is generally considered to be about 10 people. While I was there,
The wet chromate-treated magnetic recording medium described in this application was only improved mainly in terms of weather resistance, and was insufficient as a recording medium.

本発明の磁気記録媒体においては、湿式クロメート処理
によって形成されたクロム層がカーボン薄膜から成る保
護層の下地層として極めて優れた特性を有する。
In the magnetic recording medium of the present invention, the chromium layer formed by wet chromate treatment has extremely excellent properties as an underlayer for a protective layer made of a carbon thin film.

また、本発明の磁気記録媒体においては、強磁性体金属
薄膜から成る磁性層が、メッキ法、スパッタ法等の慣用
の方法で形成され得るが、工程及び装置の簡略化の点か
ら、湿式メッキ法によって形成されるのがより好ましい
In the magnetic recording medium of the present invention, the magnetic layer made of a ferromagnetic metal thin film can be formed by a conventional method such as a plating method or a sputtering method. More preferably, it is formed by a method.

本発明の磁気記録媒体は、磁気テープ、70ツピーデイ
スク、ハードディスク等、多くのものとして利用するこ
とができる。
The magnetic recording medium of the present invention can be used in many ways, such as a magnetic tape, a 70p disk, and a hard disk.

〔実施例〕〔Example〕

以下、実施例によって本発明をより詳細に説明し、本発
明の磁気記録媒体の特性を比較例と対応させて示す。
EXAMPLES Hereinafter, the present invention will be explained in more detail with reference to examples, and the characteristics of the magnetic recording medium of the present invention will be shown in conjunction with comparative examples.

実施例 厚さ25μmのポリエステルフイルムベース(東し製)
を、60°Cにおいて10%NaOH水溶液を使用して
30分間アルカリエツチングした螢、Pd/Sn混液タ
イプのアクチベーター、MS−101B(日立化成社製
)を使用して常温において30秒間のPd核づけを実施
し、さらに10%MCI  溶液を使用して30秒間の
促進化を実施して、メッキ前処理済ペースとした。
Example 25 μm thick polyester film base (manufactured by Toshi)
Fireflies were alkali-etched for 30 minutes using a 10% NaOH aqueous solution at 60°C, and Pd nuclei were etched for 30 seconds at room temperature using a Pd/Sn mixture type activator, MS-101B (manufactured by Hitachi Chemical). A pre-plated paste was prepared using a 10% MCI solution for 30 seconds of acceleration.

このペースについて、下記のメッキ条件でコバルトメッ
キを実施した。
Cobalt plating was performed on this pace under the following plating conditions.

メッキ液組成; 硫酸コバルト       106モル/を硫際ニッ+
/%/       0.04モル/を次亜燐酸ナトリ
ウム   0.25モ/I//lロツセル塩     
   tooモル/を硫  安           
   (140モル/181!I  さ       
    0,10モル/l−NaOHを加えてp)(9
,5にして、70℃において6分間の処理。
Plating solution composition; Cobalt sulfate 106 mol/Ni +
/%/ 0.04 mol/Sodium hypophosphite 0.25 mol/I//L Lotuselle salt
too moles/ammonium sulfate
(140 mol/181! I
Add 0.10 mol/l-NaOH p) (9
, 5 for 6 minutes at 70°C.

このようにして得られた磁性層を、下記の条件でクロメ
ート処理した。
The magnetic layer thus obtained was subjected to chromate treatment under the following conditions.

・り豐メート処理=2市全%無水クロム酸水溶液;処理
時間1分;処理温度常温 さらにこの上に、厚さ100大のカーボン薄]マから成
る保詐層をスパッタ法によって形成せしめた(スパッタ
条件:Arガス圧[1L2P&、DC8kW)。
・Lifium mate treatment = 2% aqueous chromic acid anhydride solution; treatment time 1 minute; treatment temperature room temperature. Furthermore, on top of this, a protective layer consisting of a thin carbon material with a thickness of 100 mm was formed by sputtering ( Sputtering conditions: Ar gas pressure [1L2P&, DC8kW).

この媒体を直径5.25インチの70ツビーデイスクサ
イズに打ち抜き、特性測定用の試料とした。
This medium was punched out into a 70-tube disc size having a diameter of 5.25 inches, and was used as a sample for measuring characteristics.

比較例1 りpム薄換層をスパッタ法によって形成せしめた(スパ
ッタ条件:Arガス圧2.OPi、 DC8kWi膜の
厚さ200人)以外は、実施例と同様の換作を行い、特
性測定用の試料を得た。
Comparative Example 1 The same process as in Example was carried out, except that a thin PM layer was formed by sputtering (sputtering conditions: Ar gas pressure of 2.OPi, DC 8kWi film thickness of 200 people), and the characteristics were measured. A sample was obtained.

比較例2 クロム薄膜層の厚さを50大にした以外は比較例1と同
様の操作を行い、特性測定用の試料を得たO 特性測定 上記3種の試料について、以下のようにその特性を測定
した。
Comparative Example 2 Samples for property measurement were obtained by performing the same operations as in Comparative Example 1 except that the thickness of the chromium thin film layer was increased to 50 mm.Property Measurement The properties of the above three samples were determined as follows. was measured.

(1)耐候性 60°C,RC= 90%の恒温恒湿チャンバー内に1
0日間放置した場合の、放置前及び放置後における磁気
特性を、VSM(東英工業社製)にて測定した。10K
G印加時の最大磁束Bmの変化率(68m)及び保磁力
Heの変化率(ΔHe)  を百分率で表わす。
(1) Weather resistance: 60°C, RC = 90% in a constant temperature and humidity chamber.
The magnetic properties before and after the sample was left for 0 days were measured using a VSM (manufactured by Toei Kogyo Co., Ltd.). 10K
The rate of change in the maximum magnetic flux Bm (68 m) and the rate of change in coercive force He (ΔHe) when G is applied are expressed as percentages.

(2)耐久走行性 70ツビーデイスク・ドライブによって1000万回走
行させ、それによって媒体表面に生じた傷を観察し、傷
が生じた度合いによって耐久走行性のランクづけをした
: ランク◎−−−−−−傷全くなし 0−−−−−−一少ない △−−−−−−−普通 X−−−−−−−多い (31it電磁変換特 性ィスク・ドライブにてビデオヘッド回転数600 r
pms 5 MHz 時の出力測定を行い、冥施例1を
OdBとした。
(2) Running durability The media were run 10 million times using a 70-tube disc drive, and the scratches that occurred on the media surface were observed, and the running durability was ranked according to the degree of scratches: Rank ◎--- ---No scratches 0--------One less △----------Normal
The output was measured at pms 5 MHz, and the output of Example 1 was expressed as OdB.

上記特性試験の結果を、表1に示す。The results of the above characteristic tests are shown in Table 1.

表  1 特性試験の結果 表1かられかるように、実施例試料は比較例1.2の試
料と同程度の良好な耐久走行性を維持しながら、耐候性
及び電磁変換特性の点で比較例の試料より優れていた。
Table 1 Results of Characteristic Tests As can be seen from Table 1, the example sample maintained good running durability comparable to that of the sample of Comparative Example 1.2, but was superior to the comparative example in terms of weather resistance and electromagnetic conversion characteristics. was superior to that of the sample.

〔発明の効果〕〔Effect of the invention〕

本発明の磁気記録媒体は、カーボン薄膜から成る保護層
を有する磁気記録媒体において金属薄H・′4から成る
磁性層と前記保護層との間に介在せしめられるクロム薄
膜層が前記磁性層の湿式クロメート処理によって形成さ
れて成るものであるから、最終的に製造される磁気記録
媒体の耐候性が改善され得るのと同時に、該磁気記録媒
体の耐久走行性が損われることなく前記クロム薄膜層が
より薄く(50Å以下、通常約10人)形成され、その
結果、磁性層と磁気ヘッドとの間のスペーシング・ロス
が小さくなるという利点がある。
The magnetic recording medium of the present invention is a magnetic recording medium having a protective layer made of a thin carbon film, in which a chromium thin film layer interposed between a magnetic layer made of a thin metal H. Since it is formed by chromate treatment, the weather resistance of the magnetic recording medium finally manufactured can be improved, and at the same time, the chromium thin film layer can be formed without impairing the running durability of the magnetic recording medium. It has the advantage of being thinner (less than 50 Å, typically about 10 layers), resulting in less spacing loss between the magnetic layer and the magnetic head.

また、本発明の磁気記録媒体は上記のようにクロム薄膜
層形成工程が磁性層の湿式クロメート処理から成り、ス
パッタ法をカーボン薄Ilり形成工程において用いるだ
けであるので、そのfJJI造工稈がよりi?i略化さ
れ得るのと同時に、スパッタ装擬についてもより単純な
構造のものを使用できる。さらに、この製造工程につい
ては、磁性層形成工程において湿式メッキ法を用いるこ
とによってより一層簡略化することができる。
Further, in the magnetic recording medium of the present invention, the chromium thin film layer forming process consists of wet chromate treatment of the magnetic layer as described above, and the sputtering method is only used in the carbon thin layer forming process, so that the fJJI culm is More i? At the same time, a simpler structure can be used for sputtering. Furthermore, this manufacturing process can be further simplified by using a wet plating method in the magnetic layer forming process.

本発明の磁気記録媒体は、高記録密度が可能であるのと
同時に、耐久走行性、耐候性及び電磁変換特性の点で非
常に優れた特性を有するものである。
The magnetic recording medium of the present invention is capable of high recording density, and at the same time has very excellent characteristics in terms of running durability, weather resistance, and electromagnetic conversion characteristics.

Claims (3)

【特許請求の範囲】[Claims] (1)非磁性支持体上に強磁性体金属薄膜から成る磁性
層を設けて成る磁気記録媒体であつて、前記磁性層上に
、スパッタ法によつて形成されたカーボン薄膜から成る
保護層と、該保護層の下地層としての湿式クロメート処
理によつて形成されたクロム薄膜層とを有することを特
徴とする前記磁気記録媒体。
(1) A magnetic recording medium comprising a magnetic layer made of a ferromagnetic metal thin film on a non-magnetic support, and a protective layer made of a carbon thin film formed by sputtering on the magnetic layer. , and a chromium thin film layer formed by wet chromate treatment as an underlayer of the protective layer.
(2)前記クロム薄膜層の厚さが50Å以下であること
を特徴とする特許請求の範囲第1項記載の磁気記録媒体
(2) The magnetic recording medium according to claim 1, wherein the thickness of the chromium thin film layer is 50 Å or less.
(3)前記の強磁性体金属薄膜から成る磁性層が湿式メ
ッキ法によつて形成されたことを特徴とする特許請求の
範囲第1項及び第2項記載の磁気記録媒体。
(3) The magnetic recording medium according to claims 1 and 2, wherein the magnetic layer made of the ferromagnetic metal thin film is formed by a wet plating method.
JP2297186A 1986-02-06 1986-02-06 Magnetic recording medium having protective layer Pending JPS62183021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2297186A JPS62183021A (en) 1986-02-06 1986-02-06 Magnetic recording medium having protective layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2297186A JPS62183021A (en) 1986-02-06 1986-02-06 Magnetic recording medium having protective layer

Publications (1)

Publication Number Publication Date
JPS62183021A true JPS62183021A (en) 1987-08-11

Family

ID=12097456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2297186A Pending JPS62183021A (en) 1986-02-06 1986-02-06 Magnetic recording medium having protective layer

Country Status (1)

Country Link
JP (1) JPS62183021A (en)

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