JPS62182971U - - Google Patents

Info

Publication number
JPS62182971U
JPS62182971U JP7129886U JP7129886U JPS62182971U JP S62182971 U JPS62182971 U JP S62182971U JP 7129886 U JP7129886 U JP 7129886U JP 7129886 U JP7129886 U JP 7129886U JP S62182971 U JPS62182971 U JP S62182971U
Authority
JP
Japan
Prior art keywords
sputtering apparatus
utility
model registration
electrode
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7129886U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7129886U priority Critical patent/JPS62182971U/ja
Publication of JPS62182971U publication Critical patent/JPS62182971U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7129886U 1986-05-14 1986-05-14 Pending JPS62182971U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7129886U JPS62182971U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7129886U JPS62182971U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Publications (1)

Publication Number Publication Date
JPS62182971U true JPS62182971U (enrdf_load_stackoverflow) 1987-11-20

Family

ID=30913727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7129886U Pending JPS62182971U (enrdf_load_stackoverflow) 1986-05-14 1986-05-14

Country Status (1)

Country Link
JP (1) JPS62182971U (enrdf_load_stackoverflow)

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