JPS6218038Y2 - - Google Patents

Info

Publication number
JPS6218038Y2
JPS6218038Y2 JP1982091411U JP9141182U JPS6218038Y2 JP S6218038 Y2 JPS6218038 Y2 JP S6218038Y2 JP 1982091411 U JP1982091411 U JP 1982091411U JP 9141182 U JP9141182 U JP 9141182U JP S6218038 Y2 JPS6218038 Y2 JP S6218038Y2
Authority
JP
Japan
Prior art keywords
stage
spring
rotation
column
fine movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982091411U
Other languages
English (en)
Japanese (ja)
Other versions
JPS587111U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9141182U priority Critical patent/JPS587111U/ja
Publication of JPS587111U publication Critical patent/JPS587111U/ja
Application granted granted Critical
Publication of JPS6218038Y2 publication Critical patent/JPS6218038Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Microscoopes, Condenser (AREA)
  • Machine Tool Units (AREA)
JP9141182U 1982-06-18 1982-06-18 ステ−ジの回転微動装置 Granted JPS587111U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9141182U JPS587111U (ja) 1982-06-18 1982-06-18 ステ−ジの回転微動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9141182U JPS587111U (ja) 1982-06-18 1982-06-18 ステ−ジの回転微動装置

Publications (2)

Publication Number Publication Date
JPS587111U JPS587111U (ja) 1983-01-18
JPS6218038Y2 true JPS6218038Y2 (instruction) 1987-05-09

Family

ID=29886492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9141182U Granted JPS587111U (ja) 1982-06-18 1982-06-18 ステ−ジの回転微動装置

Country Status (1)

Country Link
JP (1) JPS587111U (instruction)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0731259B2 (ja) * 1986-09-16 1995-04-10 株式会社宮沢マシン 回転テーブル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336757B2 (instruction) * 1972-05-26 1978-10-04

Also Published As

Publication number Publication date
JPS587111U (ja) 1983-01-18

Similar Documents

Publication Publication Date Title
JPH0249527Y2 (instruction)
US5781364A (en) Coarse and fine head positioning apparatus which uses a slipable shaft in a motor
JP3104385B2 (ja) 測量機の粗微動装置
JPH02119548A (ja) リニア・アクチエータ
WO1996032223A1 (fr) Mecanisme a mouvement tournant
JPS63244205A (ja) 位置決め装置
JPS6218038Y2 (instruction)
JPH02139146A (ja) 一段６自由度位置決めテーブル
JP2005279902A (ja) 研磨加工装置及び研磨加工方法
JPS62292389A (ja) ロボット用手首機構
JP2782715B2 (ja) 精密位置決め装置
JP2002311199A (ja) Ｘ線回折装置用ゴニオメータ
JPH0529575Y2 (instruction)
JPS5831404Y2 (ja) ステ−ジの上下，左右傾斜及び前後傾斜微動装置
JP2583432Y2 (ja) チルトテーブル装置
JP3186188B2 (ja) テーブル送り装置
JPS59115140A (ja) 精密位置決めテ−ブル
JPS63283836A (ja) 高精度移動ステ−ジ
JP2526555B2 (ja) ヘツド移動装置
JPH0442132B2 (instruction)
JP2642415B2 (ja) 回転テーブル装置
JPS5811492Y2 (ja) ころ軸受転走面クラウニング用砥石修正装置
JPH03164075A (ja) 精密直動アクチュエーター
JPS61244432A (ja) 回動装置
JPS61209835A (ja) Ｘｙステ−ジ