JPS62176128A - パタ−ン形成方法 - Google Patents

パタ−ン形成方法

Info

Publication number
JPS62176128A
JPS62176128A JP61016736A JP1673686A JPS62176128A JP S62176128 A JPS62176128 A JP S62176128A JP 61016736 A JP61016736 A JP 61016736A JP 1673686 A JP1673686 A JP 1673686A JP S62176128 A JPS62176128 A JP S62176128A
Authority
JP
Japan
Prior art keywords
pattern
exposure
line
reticle
lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61016736A
Other languages
English (en)
Japanese (ja)
Other versions
JPH033375B2 (enrdf_load_stackoverflow
Inventor
Akihiko Nakayama
明彦 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP61016736A priority Critical patent/JPS62176128A/ja
Publication of JPS62176128A publication Critical patent/JPS62176128A/ja
Publication of JPH033375B2 publication Critical patent/JPH033375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP61016736A 1986-01-30 1986-01-30 パタ−ン形成方法 Granted JPS62176128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61016736A JPS62176128A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61016736A JPS62176128A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS62176128A true JPS62176128A (ja) 1987-08-01
JPH033375B2 JPH033375B2 (enrdf_load_stackoverflow) 1991-01-18

Family

ID=11924553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61016736A Granted JPS62176128A (ja) 1986-01-30 1986-01-30 パタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS62176128A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH033375B2 (enrdf_load_stackoverflow) 1991-01-18

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