JPS6217481Y2 - - Google Patents

Info

Publication number

JPS6217481Y2

JPS6217481Y2 JP2914181U JP2914181U JPS6217481Y2 JP S6217481 Y2 JPS6217481 Y2 JP S6217481Y2 JP 2914181 U JP2914181 U JP 2914181U JP 2914181 U JP2914181 U JP 2914181U JP S6217481 Y2 JPS6217481 Y2 JP S6217481Y2

Authority

JP

Japan

Prior art keywords

susceptor

heating

tube

temperature

vapor phase

Prior art date

1981-03-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 238000006243 chemical reaction Methods 0.000 claims description 10
• 239000010453 quartz Substances 0.000 claims description 10
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
• 238000001947 vapour-phase growth Methods 0.000 claims description 6
• 238000001816 cooling Methods 0.000 claims description 4
• 229910052751 metal Inorganic materials 0.000 claims description 4
• 239000002184 metal Substances 0.000 claims description 4
• 238000007664 blowing Methods 0.000 claims description 2
• 239000012159 carrier gas Substances 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 claims 4
• 239000000758 substrate Substances 0.000 claims 1
• 235000012431 wafers Nutrition 0.000 description 11
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
• 229910052710 silicon Inorganic materials 0.000 description 5
• 239000010703 silicon Substances 0.000 description 5
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
• 229910052799 carbon Inorganic materials 0.000 description 3
• 239000007789 gas Substances 0.000 description 3
• 238000000034 method Methods 0.000 description 3
• 239000000498 cooling water Substances 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 229910052739 hydrogen Inorganic materials 0.000 description 1
• 239000001257 hydrogen Substances 0.000 description 1
• OHZZTXYKLXZFSZ-UHFFFAOYSA-I manganese(3+) 5,10,15-tris(1-methylpyridin-1-ium-4-yl)-20-(1-methylpyridin-4-ylidene)porphyrin-22-ide pentachloride Chemical compound [Cl-].[Cl-].[Cl-].[Cl-].[Cl-].[Mn+3].C1=CN(C)C=CC1=C1C(C=C2)=NC2=C(C=2C=C[N+](C)=CC=2)C([N-]2)=CC=C2C(C=2C=C[N+](C)=CC=2)=C(C=C2)N=C2C(C=2C=C[N+](C)=CC=2)=C2N=C1C=C2 OHZZTXYKLXZFSZ-UHFFFAOYSA-I 0.000 description 1
• 229910052750 molybdenum Inorganic materials 0.000 description 1
• 239000011733 molybdenum Substances 0.000 description 1
• 230000010355 oscillation Effects 0.000 description 1
• 238000006722 reduction reaction Methods 0.000 description 1