JPS62172863U - - Google Patents
Info
- Publication number
- JPS62172863U JPS62172863U JP6209786U JP6209786U JPS62172863U JP S62172863 U JPS62172863 U JP S62172863U JP 6209786 U JP6209786 U JP 6209786U JP 6209786 U JP6209786 U JP 6209786U JP S62172863 U JPS62172863 U JP S62172863U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- shaft member
- piston plate
- space chamber
- gate valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986062097U JPH0542282Y2 (US07922777-20110412-C00004.png) | 1986-04-23 | 1986-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986062097U JPH0542282Y2 (US07922777-20110412-C00004.png) | 1986-04-23 | 1986-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172863U true JPS62172863U (US07922777-20110412-C00004.png) | 1987-11-02 |
| JPH0542282Y2 JPH0542282Y2 (US07922777-20110412-C00004.png) | 1993-10-25 |
Family
ID=30896044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986062097U Expired - Lifetime JPH0542282Y2 (US07922777-20110412-C00004.png) | 1986-04-23 | 1986-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542282Y2 (US07922777-20110412-C00004.png) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11315939A (ja) * | 1998-05-08 | 1999-11-16 | Ckd Corp | ゲート式真空遮断弁 |
| JP2004316916A (ja) * | 2003-04-16 | 2004-11-11 | Vat Holding Ag | 少なくとも一つの開口を有する真空閉塞体の閉塞装置 |
| KR20060043814A (ko) * | 2004-04-21 | 2006-05-15 | 오노데라 고이치 | 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법 |
| JP2007170666A (ja) * | 2005-12-20 | 2007-07-05 | Vat Holding Ag | 振り子とスライドゲート真空バルブ |
| WO2012121410A1 (ja) * | 2011-03-10 | 2012-09-13 | 株式会社アルバック | 仕切弁及びスライド弁 |
| JP2012189138A (ja) * | 2011-03-10 | 2012-10-04 | Ulvac Japan Ltd | 仕切弁 |
| JP2012193817A (ja) * | 2011-03-17 | 2012-10-11 | Ulvac Japan Ltd | 仕切弁 |
| JP2012193812A (ja) * | 2011-03-17 | 2012-10-11 | Ulvac Japan Ltd | 仕切弁 |
| JP2012229753A (ja) * | 2011-04-26 | 2012-11-22 | Ulvac Japan Ltd | スライド弁 |
| JP2012233564A (ja) * | 2011-04-19 | 2012-11-29 | Smc Corp | ゲートバルブ |
| JP2013124773A (ja) * | 2011-12-13 | 2013-06-24 | Irie Koken Kk | ゲートバルブのベローズ保護構造 |
| KR101323811B1 (ko) * | 2005-12-20 | 2013-10-31 | 배트 홀딩 아게 | 흐름 경로의 필수적인 기밀 폐쇄를 위한 밸브 |
| JP2013245739A (ja) * | 2012-05-24 | 2013-12-09 | Ulvac Japan Ltd | 仕切弁 |
| JP2014037889A (ja) * | 2012-08-17 | 2014-02-27 | Vat Holding Ag | バルブ |
| WO2017021120A1 (de) * | 2015-08-06 | 2017-02-09 | Vat Holding Ag | Ventil, vorzugsweise vakuumventil |
| JP2018515727A (ja) * | 2015-05-04 | 2018-06-14 | エム． ブラウン イナートガース−ズュステーメ ゲゼルシャフト ミット ベシュレンクテル ハフツングＭ． Ｂｒａｕｎ Ｉｎｅｒｔｇａｓ−Ｓｙｓｔｅｍｅ ＧｍｂＨ | 切換弁 |
| KR20190136699A (ko) * | 2018-05-31 | 2019-12-10 | 주식회사 에이씨엔 | 공간 절약형 게이트 밸브 시스템 |
| KR20190136700A (ko) * | 2018-05-31 | 2019-12-10 | 주식회사 에이씨엔 | 공간 절약형 멀티 플런저 게이트 밸브 시스템 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523255U (US07922777-20110412-C00004.png) * | 1978-07-28 | 1980-02-14 |
-
1986
- 1986-04-23 JP JP1986062097U patent/JPH0542282Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5523255U (US07922777-20110412-C00004.png) * | 1978-07-28 | 1980-02-14 |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11315939A (ja) * | 1998-05-08 | 1999-11-16 | Ckd Corp | ゲート式真空遮断弁 |
| JP2004316916A (ja) * | 2003-04-16 | 2004-11-11 | Vat Holding Ag | 少なくとも一つの開口を有する真空閉塞体の閉塞装置 |
| KR20060043814A (ko) * | 2004-04-21 | 2006-05-15 | 오노데라 고이치 | 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법 |
| KR101323811B1 (ko) * | 2005-12-20 | 2013-10-31 | 배트 홀딩 아게 | 흐름 경로의 필수적인 기밀 폐쇄를 위한 밸브 |
| JP2007170666A (ja) * | 2005-12-20 | 2007-07-05 | Vat Holding Ag | 振り子とスライドゲート真空バルブ |
| KR101323311B1 (ko) * | 2005-12-20 | 2013-10-30 | 배트 홀딩 아게 | 유로를 가스 기밀하게 폐쇄하는 밸브 |
| WO2012121410A1 (ja) * | 2011-03-10 | 2012-09-13 | 株式会社アルバック | 仕切弁及びスライド弁 |
| JP2012189138A (ja) * | 2011-03-10 | 2012-10-04 | Ulvac Japan Ltd | 仕切弁 |
| JP2012193817A (ja) * | 2011-03-17 | 2012-10-11 | Ulvac Japan Ltd | 仕切弁 |
| JP2012193812A (ja) * | 2011-03-17 | 2012-10-11 | Ulvac Japan Ltd | 仕切弁 |
| JP2012233564A (ja) * | 2011-04-19 | 2012-11-29 | Smc Corp | ゲートバルブ |
| JP2012229753A (ja) * | 2011-04-26 | 2012-11-22 | Ulvac Japan Ltd | スライド弁 |
| JP2013124773A (ja) * | 2011-12-13 | 2013-06-24 | Irie Koken Kk | ゲートバルブのベローズ保護構造 |
| JP2013245739A (ja) * | 2012-05-24 | 2013-12-09 | Ulvac Japan Ltd | 仕切弁 |
| JP2014037889A (ja) * | 2012-08-17 | 2014-02-27 | Vat Holding Ag | バルブ |
| JP2018515727A (ja) * | 2015-05-04 | 2018-06-14 | エム． ブラウン イナートガース−ズュステーメ ゲゼルシャフト ミット ベシュレンクテル ハフツングＭ． Ｂｒａｕｎ Ｉｎｅｒｔｇａｓ−Ｓｙｓｔｅｍｅ ＧｍｂＨ | 切換弁 |
| WO2017021120A1 (de) * | 2015-08-06 | 2017-02-09 | Vat Holding Ag | Ventil, vorzugsweise vakuumventil |
| KR20180035822A (ko) * | 2015-08-06 | 2018-04-06 | 배트 홀딩 아게 | 바람직하게는 진공밸브인 밸브 |
| KR20190136699A (ko) * | 2018-05-31 | 2019-12-10 | 주식회사 에이씨엔 | 공간 절약형 게이트 밸브 시스템 |
| KR20190136700A (ko) * | 2018-05-31 | 2019-12-10 | 주식회사 에이씨엔 | 공간 절약형 멀티 플런저 게이트 밸브 시스템 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542282Y2 (US07922777-20110412-C00004.png) | 1993-10-25 |
