JPS62172551U - - Google Patents

Info

Publication number
JPS62172551U
JPS62172551U JP5925486U JP5925486U JPS62172551U JP S62172551 U JPS62172551 U JP S62172551U JP 5925486 U JP5925486 U JP 5925486U JP 5925486 U JP5925486 U JP 5925486U JP S62172551 U JPS62172551 U JP S62172551U
Authority
JP
Japan
Prior art keywords
guide
tape
polishing
sample stage
abrasive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5925486U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5925486U priority Critical patent/JPS62172551U/ja
Publication of JPS62172551U publication Critical patent/JPS62172551U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
図面はこの考案の研摩装置の１実施例を示し、
第１図は全体斜視図、第２図は研摩試料としての
ヘツドチツプブロツクをテープ対接面側から見た
正面図である。 １……研摩テープ、２６……試料台、２７……
研摩試料、Ａ……走行系、Ｂ……往復運動手段。

Claims (1)

  1. 【実用新案登録請求の範囲】 平面状ガイドに沿つて走行する研摩テープの
    走行系と、前記研摩テープの前記ガイドとの反対
    側に前記ガイドに平行に往復動自在に設けられ研
    摩試料を支持して前記ガイド上の研摩テープに当
    接させる試料台と、前記試料台を前記研摩テープ
    の走行速度に比し高速で往復移動させる往復運動
    手段とを備えた研摩装置。 試料台が研摩テープの長手方向に往復移動す
    る実用新案登録請求の範囲第１項に記載の研摩装
    置。
JP5925486U 1986-04-19 1986-04-19 Pending JPS62172551U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5925486U JPS62172551U (ja) 1986-04-19 1986-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5925486U JPS62172551U (ja) 1986-04-19 1986-04-19

Publications (1)

Publication Number Publication Date
JPS62172551U true JPS62172551U (ja) 1987-11-02

Family

ID=30890576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5925486U Pending JPS62172551U (ja) 1986-04-19 1986-04-19

Country Status (1)

Country Link
JP (1) JPS62172551U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009011408A1 (ja) * 2007-07-18 2009-01-22 Ebara Corporation 研磨装置
JP2009039853A (ja) * 2007-07-18 2009-02-26 Ebara Corp 研磨装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169324A (ja) * 1982-03-30 1983-10-05 Sanshin Shoko:Kk フレキシブルディスクヘッドの自動面取加工方法及びその装置
JPS59171020A (ja) * 1983-03-18 1984-09-27 Matsushita Electric Ind Co Ltd 磁気ヘツド研摩装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169324A (ja) * 1982-03-30 1983-10-05 Sanshin Shoko:Kk フレキシブルディスクヘッドの自動面取加工方法及びその装置
JPS59171020A (ja) * 1983-03-18 1984-09-27 Matsushita Electric Ind Co Ltd 磁気ヘツド研摩装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009011408A1 (ja) * 2007-07-18 2009-01-22 Ebara Corporation 研磨装置
JP2009039853A (ja) * 2007-07-18 2009-02-26 Ebara Corp 研磨装置

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