JPS62172149U - - Google Patents
Info
- Publication number
- JPS62172149U JPS62172149U JP4594386U JP4594386U JPS62172149U JP S62172149 U JPS62172149 U JP S62172149U JP 4594386 U JP4594386 U JP 4594386U JP 4594386 U JP4594386 U JP 4594386U JP S62172149 U JPS62172149 U JP S62172149U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- rotating body
- opening
- charged particle
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 238000002039 particle-beam lithography Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986045943U JPH0749788Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子線描画装置等におけるカセツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986045943U JPH0749788Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子線描画装置等におけるカセツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172149U true JPS62172149U (ar) | 1987-10-31 |
| JPH0749788Y2 JPH0749788Y2 (ja) | 1995-11-13 |
Family
ID=30865145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986045943U Expired - Lifetime JPH0749788Y2 (ja) | 1986-03-28 | 1986-03-28 | 荷電粒子線描画装置等におけるカセツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749788Y2 (ar) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979524A (ja) * | 1982-10-29 | 1984-05-08 | Toshiba Corp | 試料保持用静電チヤツクカセツト装置 |
-
1986
- 1986-03-28 JP JP1986045943U patent/JPH0749788Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5979524A (ja) * | 1982-10-29 | 1984-05-08 | Toshiba Corp | 試料保持用静電チヤツクカセツト装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0749788Y2 (ja) | 1995-11-13 |
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