JPS62172145U - - Google Patents

Info

Publication number
JPS62172145U
JPS62172145U JP6021386U JP6021386U JPS62172145U JP S62172145 U JPS62172145 U JP S62172145U JP 6021386 U JP6021386 U JP 6021386U JP 6021386 U JP6021386 U JP 6021386U JP S62172145 U JPS62172145 U JP S62172145U
Authority
JP
Japan
Prior art keywords
surface treatment
compound
clusters
temperature
cluster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6021386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6021386U priority Critical patent/JPS62172145U/ja
Publication of JPS62172145U publication Critical patent/JPS62172145U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6021386U 1986-04-23 1986-04-23 Pending JPS62172145U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6021386U JPS62172145U (enrdf_load_html_response) 1986-04-23 1986-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6021386U JPS62172145U (enrdf_load_html_response) 1986-04-23 1986-04-23

Publications (1)

Publication Number Publication Date
JPS62172145U true JPS62172145U (enrdf_load_html_response) 1987-10-31

Family

ID=30892426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6021386U Pending JPS62172145U (enrdf_load_html_response) 1986-04-23 1986-04-23

Country Status (1)

Country Link
JP (1) JPS62172145U (enrdf_load_html_response)

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