JPS62172035A - プラズマ処理機 - Google Patents
プラズマ処理機Info
- Publication number
- JPS62172035A JPS62172035A JP1369586A JP1369586A JPS62172035A JP S62172035 A JPS62172035 A JP S62172035A JP 1369586 A JP1369586 A JP 1369586A JP 1369586 A JP1369586 A JP 1369586A JP S62172035 A JPS62172035 A JP S62172035A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- frame
- reduced pressure
- vessel
- terminals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004804 winding Methods 0.000 claims abstract description 15
- 239000000498 cooling water Substances 0.000 claims abstract description 4
- 230000006837 decompression Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 9
- 239000000835 fiber Substances 0.000 description 9
- 239000004744 fabric Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000012209 synthetic fiber Substances 0.000 description 2
- 229920002994 synthetic fiber Polymers 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- -1 yarns Substances 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Treatment Of Fiber Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1369586A JPS62172035A (ja) | 1986-01-27 | 1986-01-27 | プラズマ処理機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1369586A JPS62172035A (ja) | 1986-01-27 | 1986-01-27 | プラズマ処理機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172035A true JPS62172035A (ja) | 1987-07-29 |
| JPH034571B2 JPH034571B2 (enrdf_load_stackoverflow) | 1991-01-23 |
Family
ID=11840328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1369586A Granted JPS62172035A (ja) | 1986-01-27 | 1986-01-27 | プラズマ処理機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172035A (enrdf_load_stackoverflow) |
-
1986
- 1986-01-27 JP JP1369586A patent/JPS62172035A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034571B2 (enrdf_load_stackoverflow) | 1991-01-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |