JPH034571B2 - - Google Patents

Info

Publication number
JPH034571B2
JPH034571B2 JP1369586A JP1369586A JPH034571B2 JP H034571 B2 JPH034571 B2 JP H034571B2 JP 1369586 A JP1369586 A JP 1369586A JP 1369586 A JP1369586 A JP 1369586A JP H034571 B2 JPH034571 B2 JP H034571B2
Authority
JP
Japan
Prior art keywords
reduced pressure
plasma
container
processing
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1369586A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62172035A (ja
Inventor
Hidehiro Okamoto
Katsumi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP1369586A priority Critical patent/JPS62172035A/ja
Publication of JPS62172035A publication Critical patent/JPS62172035A/ja
Publication of JPH034571B2 publication Critical patent/JPH034571B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1369586A 1986-01-27 1986-01-27 プラズマ処理機 Granted JPS62172035A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1369586A JPS62172035A (ja) 1986-01-27 1986-01-27 プラズマ処理機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1369586A JPS62172035A (ja) 1986-01-27 1986-01-27 プラズマ処理機

Publications (2)

Publication Number Publication Date
JPS62172035A JPS62172035A (ja) 1987-07-29
JPH034571B2 true JPH034571B2 (enrdf_load_stackoverflow) 1991-01-23

Family

ID=11840328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1369586A Granted JPS62172035A (ja) 1986-01-27 1986-01-27 プラズマ処理機

Country Status (1)

Country Link
JP (1) JPS62172035A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62172035A (ja) 1987-07-29

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees