JPS62169458U - - Google Patents

Info

Publication number
JPS62169458U
JPS62169458U JP5771786U JP5771786U JPS62169458U JP S62169458 U JPS62169458 U JP S62169458U JP 5771786 U JP5771786 U JP 5771786U JP 5771786 U JP5771786 U JP 5771786U JP S62169458 U JPS62169458 U JP S62169458U
Authority
JP
Japan
Prior art keywords
view
field
photographing
adjustment
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5771786U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5771786U priority Critical patent/JPS62169458U/ja
Publication of JPS62169458U publication Critical patent/JPS62169458U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案による電子線偏向装置の一実施
例を示す図、第２図は撮影視野と調整用視野との
位置関係を示す図、第３図は撮影手順を示す図で
、同図Ａは視野選択の様子を示す図、同図Ｂは調
整時の様子を示す図、同図Ｃは撮影視野に戻した
状態を示す図である。 １……撮影対象視野、２……調整用視野、３…
…走査コイル、４……第１偏向コイル、５……第
２偏向コイル、６……試料、７，８……増幅器、
９……倍率制御器、１０……スイツチ、１１……
撮影視野の中心ビーム、１１′，１１″……走査
ビーム、１２……調整用視野の中心ビーム、１２
′，１２″……走査ビーム。 FIG. 1 is a diagram showing an embodiment of the electron beam deflection device according to the present invention, FIG. 2 is a diagram showing the positional relationship between the photographing field of view and the adjustment field of view, and FIG. 3 is a diagram showing the photographing procedure. A is a diagram showing how the field of view is selected, B is a diagram showing a state during adjustment, and C is a diagram showing a state where the field of view is returned to photographing. 1... Field of view to be photographed, 2... Field of view for adjustment, 3...
...Scanning coil, 4...First deflection coil, 5...Second deflection coil, 6...Sample, 7, 8...Amplifier,
9... Magnification controller, 10... Switch, 11...
Center beam of photographing field of view, 11', 11''...Scanning beam, 12...Center beam of adjustment field of view, 12
', 12''...Scanning beam.

Claims (1)

【実用新案登録請求の範囲】 (1) 視野選択後、非点収差補正、焦点合わせを
調整用視野で行つた後撮影視野に偏向を戻して撮
影を行うための電子線偏向装置であつて、撮影視
野と調整用視野間の視野移動を、撮影視野と調整
用視野の大きさに応じた距離だけ行うことを特徴
とする電子線偏向装置。 (2) 前記視野選択は低倍率で行うことを特徴と
する実用新案登録請求の範囲第１項記載の電子線
偏向装置。 (3) 前記調整用視野は撮影視野より小さいこと
を特徴とする実用新案登録請求の範囲第１項記載
の電子線偏向装置。[Scope of Claim for Utility Model Registration] (1) An electron beam deflection device for performing imaging by correcting astigmatism and focusing in the adjustment field of view after selecting the field of view, and then returning the deflection to the field of view for photographing, An electron beam deflection device characterized in that the field of view is moved between a photographing field of view and an adjustment field of view by a distance corresponding to the size of the photographing field of view and the adjustment field of view. (2) The electron beam deflection device according to claim 1, wherein the field of view selection is performed at a low magnification. (3) The electron beam deflection device according to claim 1, wherein the field of view for adjustment is smaller than the field of view for photographing.
JP5771786U 1986-04-17 1986-04-17 Pending JPS62169458U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5771786U JPS62169458U (en) 1986-04-17 1986-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5771786U JPS62169458U (en) 1986-04-17 1986-04-17

Publications (1)

Publication Number Publication Date
JPS62169458U true JPS62169458U (en) 1987-10-27

Family

ID=30887672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5771786U Pending JPS62169458U (en) 1986-04-17 1986-04-17

Country Status (1)

Country Link
JP (1) JPS62169458U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139845A (en) * 1988-11-18 1990-05-29 Nippon Telegr & Teleph Corp <Ntt> Focusing method
JP2002134048A (en) * 2000-10-27 2002-05-10 Hitachi Ltd Charged particle ray apparatus
JP2003203594A (en) * 2001-12-28 2003-07-18 Hitachi High-Technologies Corp Charged corpuscular beam device and sample image observing method
JP2010244740A (en) * 2009-04-02 2010-10-28 Hitachi High-Technologies Corp Review device and review method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5727548A (en) * 1980-07-25 1982-02-13 Hitachi Ltd Scanning type electron microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5727548A (en) * 1980-07-25 1982-02-13 Hitachi Ltd Scanning type electron microscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02139845A (en) * 1988-11-18 1990-05-29 Nippon Telegr & Teleph Corp <Ntt> Focusing method
JP2002134048A (en) * 2000-10-27 2002-05-10 Hitachi Ltd Charged particle ray apparatus
JP2003203594A (en) * 2001-12-28 2003-07-18 Hitachi High-Technologies Corp Charged corpuscular beam device and sample image observing method
JP2010244740A (en) * 2009-04-02 2010-10-28 Hitachi High-Technologies Corp Review device and review method

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