JPH0181857U - - Google Patents
Info
- Publication number
- JPH0181857U JPH0181857U JP1987176488U JP17648887U JPH0181857U JP H0181857 U JPH0181857 U JP H0181857U JP 1987176488 U JP1987176488 U JP 1987176488U JP 17648887 U JP17648887 U JP 17648887U JP H0181857 U JPH0181857 U JP H0181857U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- astigmatism
- control signal
- correcting
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 201000009310 astigmatism Diseases 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本案の一実施例を示す図、第２図は従
来技術の一実施例を示す図である。
１……電子線、２……非点収差補正コイル、３
……収束コイル、４……電流増幅器、５……制御
信号加算器、６……切換スイツチ、７……信号調
整手段。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing an embodiment of the prior art. 1...Electron beam, 2...Astigmatism correction coil, 3
... Convergence coil, 4 ... Current amplifier, 5 ... Control signal adder, 6 ... Changeover switch, 7 ... Signal adjustment means.
Claims (1)
手段と、電子線を収束する手段と、電子線の非点
収差を補正する手段を有する走査形電子顕微鏡ま
たは、類似装置において、前記、電子線の非点収
差を補正する手段の制御信号に、固定の制御信号
を加算する手段を設けたことを特徴とする走査電
子顕微鏡の非点収差補正装置。 In a scanning electron microscope or similar device having means for generating an electron beam, means for deflecting the electron beam, means for converging the electron beam, and means for correcting astigmatism of the electron beam, the electron beam is 1. An astigmatism correcting device for a scanning electron microscope, comprising means for adding a fixed control signal to a control signal of a means for correcting astigmatism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176488U JPH0181857U (en) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176488U JPH0181857U (en) | 1987-11-20 | 1987-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0181857U true JPH0181857U (en) | 1989-05-31 |
Family
ID=31468219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176488U Pending JPH0181857U (en) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0181857U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1027563A (en) * | 1996-07-10 | 1998-01-27 | Jeol Ltd | Scanning electron microscope |
-
1987
- 1987-11-20 JP JP1987176488U patent/JPH0181857U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1027563A (en) * | 1996-07-10 | 1998-01-27 | Jeol Ltd | Scanning electron microscope |