JPS6216868U - - Google Patents

Info

Publication number
JPS6216868U
JPS6216868U JP10760585U JP10760585U JPS6216868U JP S6216868 U JPS6216868 U JP S6216868U JP 10760585 U JP10760585 U JP 10760585U JP 10760585 U JP10760585 U JP 10760585U JP S6216868 U JPS6216868 U JP S6216868U
Authority
JP
Japan
Prior art keywords
valve body
opened
closed
gate valve
process equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10760585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247832Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985107605U priority Critical patent/JPH0247832Y2/ja
Publication of JPS6216868U publication Critical patent/JPS6216868U/ja
Application granted granted Critical
Publication of JPH0247832Y2 publication Critical patent/JPH0247832Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP1985107605U 1985-07-16 1985-07-16 Expired JPH0247832Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985107605U JPH0247832Y2 (enrdf_load_stackoverflow) 1985-07-16 1985-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985107605U JPH0247832Y2 (enrdf_load_stackoverflow) 1985-07-16 1985-07-16

Publications (2)

Publication Number Publication Date
JPS6216868U true JPS6216868U (enrdf_load_stackoverflow) 1987-01-31
JPH0247832Y2 JPH0247832Y2 (enrdf_load_stackoverflow) 1990-12-14

Family

ID=30984038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985107605U Expired JPH0247832Y2 (enrdf_load_stackoverflow) 1985-07-16 1985-07-16

Country Status (1)

Country Link
JP (1) JPH0247832Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007013227A1 (ja) * 2005-07-29 2007-02-01 Kitz Sct Corporation スライドバルブ
WO2008139937A1 (ja) * 2007-05-08 2008-11-20 Tokyo Electron Limited バルブおよび該バルブを備えた処理装置
JP2011506873A (ja) * 2007-12-11 2011-03-03 アイゼントロピック リミテッド バルブ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007013227A1 (ja) * 2005-07-29 2007-02-01 Kitz Sct Corporation スライドバルブ
JP2011247426A (ja) * 2005-07-29 2011-12-08 Kitz Sct:Kk スライドバルブ
WO2008139937A1 (ja) * 2007-05-08 2008-11-20 Tokyo Electron Limited バルブおよび該バルブを備えた処理装置
JP5011382B2 (ja) * 2007-05-08 2012-08-29 東京エレクトロン株式会社 バルブおよび該バルブを備えた処理装置
JP2011506873A (ja) * 2007-12-11 2011-03-03 アイゼントロピック リミテッド バルブ

Also Published As

Publication number Publication date
JPH0247832Y2 (enrdf_load_stackoverflow) 1990-12-14

Similar Documents

Publication Publication Date Title
JPS6216868U (enrdf_load_stackoverflow)
AU590768B2 (en) A plug valve
JPH01126956U (enrdf_load_stackoverflow)
JPS59193169U (ja) 密封容器
JPH0484151U (enrdf_load_stackoverflow)
JPS5840661U (ja) グランドパツキンレスストツプバルブ
JPS6174511U (enrdf_load_stackoverflow)
JPS6390435U (enrdf_load_stackoverflow)
JPS63162199U (enrdf_load_stackoverflow)
JPS61187303U (enrdf_load_stackoverflow)
JPS62201727U (enrdf_load_stackoverflow)
JPS61149520U (enrdf_load_stackoverflow)
JPS6372367U (enrdf_load_stackoverflow)
JPS6332150U (enrdf_load_stackoverflow)
JPS6374569U (enrdf_load_stackoverflow)
JPH0170189U (enrdf_load_stackoverflow)
JPS62106095U (enrdf_load_stackoverflow)
JPS58143364U (ja) プラスチツク製保護袋
JPH0246183U (enrdf_load_stackoverflow)
JPH0182384U (enrdf_load_stackoverflow)
JPH01144376U (enrdf_load_stackoverflow)
JPS61200971U (enrdf_load_stackoverflow)
JPS60187753U (ja) 高圧容器の開封装置
JPS5891057U (ja) ガス封止体
JPH0185258U (enrdf_load_stackoverflow)