JPS6216868U - - Google Patents
Info
- Publication number
- JPS6216868U JPS6216868U JP10760585U JP10760585U JPS6216868U JP S6216868 U JPS6216868 U JP S6216868U JP 10760585 U JP10760585 U JP 10760585U JP 10760585 U JP10760585 U JP 10760585U JP S6216868 U JPS6216868 U JP S6216868U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- opened
- closed
- gate valve
- process equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 4
- 238000010884 ion-beam technique Methods 0.000 claims 1
Description
第１〜３図は本考案の一実施例をそれぞれ異な
つた状態において示す概略断面図である。
図中、１……バルブ本体、１ｅ……シール面、
４……弁体、５……シール面保護用Ｏリング、６
……シール用Ｏリング。
1 to 3 are schematic sectional views showing one embodiment of the present invention in different states. In the figure, 1... Valve body, 1e... Seal surface,
4... Valve body, 5... O-ring for sealing surface protection, 6
... O-ring for sealing.
Claims (1)
せたり止めたりするために開閉できるようにされ
た真空プロセス装置用ゲートバルブにおいて、弁
体を閉成時および開放時の両状態時にバルブ本体
のシール面に対して密封的に接触するようにした
ことを特徴とする真空プロセス装置用ゲートバル
ブ。 ２ 弁体がシール用Ｏリングとバルブ本体のシー
ル面保護用Ｏリングとを備えている特許請求の範
囲第１項に記載の真空プロセス装置用ゲートバル
ブ。[Claims for Utility Model Registration] 1. In a gate valve for vacuum process equipment that can be opened and closed to pass or stop a process medium such as an ion beam, the valve body can be opened and closed when the valve body is closed or opened. A gate valve for vacuum process equipment, characterized in that the gate valve is in sealed contact with a sealing surface of a valve body when in a state. 2. The gate valve for vacuum process equipment according to claim 1, wherein the valve body includes an O-ring for sealing and an O-ring for protecting the sealing surface of the valve body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985107605U JPH0247832Y2 (en) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985107605U JPH0247832Y2 (en) | 1985-07-16 | 1985-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216868U true JPS6216868U (en) | 1987-01-31 |
| JPH0247832Y2 JPH0247832Y2 (en) | 1990-12-14 |
Family
ID=30984038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985107605U Expired JPH0247832Y2 (en) | 1985-07-16 | 1985-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247832Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007013227A1 (en) * | 2005-07-29 | 2007-02-01 | Kitz Sct Corporation | Slide valve |
| WO2008139937A1 (en) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | Valve and processing device with the valve |
| JP2011506873A (en) * | 2007-12-11 | 2011-03-03 | アイゼントロピック リミテッド | valve |
-
1985
- 1985-07-16 JP JP1985107605U patent/JPH0247832Y2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007013227A1 (en) * | 2005-07-29 | 2007-02-01 | Kitz Sct Corporation | Slide valve |
| JP2011247426A (en) * | 2005-07-29 | 2011-12-08 | Kitz Sct:Kk | Slide valve |
| WO2008139937A1 (en) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | Valve and processing device with the valve |
| JP5011382B2 (en) * | 2007-05-08 | 2012-08-29 | 東京エレクトロン株式会社 | Valve and processing apparatus provided with the valve |
| JP2011506873A (en) * | 2007-12-11 | 2011-03-03 | アイゼントロピック リミテッド | valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0247832Y2 (en) | 1990-12-14 |
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