JPS6216868U - - Google Patents
Info
- Publication number
- JPS6216868U JPS6216868U JP10760585U JP10760585U JPS6216868U JP S6216868 U JPS6216868 U JP S6216868U JP 10760585 U JP10760585 U JP 10760585U JP 10760585 U JP10760585 U JP 10760585U JP S6216868 U JPS6216868 U JP S6216868U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- opened
- closed
- gate valve
- process equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 4
- 238000010884 ion-beam technique Methods 0.000 claims 1
Landscapes
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985107605U JPH0247832Y2 (de) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985107605U JPH0247832Y2 (de) | 1985-07-16 | 1985-07-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6216868U true JPS6216868U (de) | 1987-01-31 |
JPH0247832Y2 JPH0247832Y2 (de) | 1990-12-14 |
Family
ID=30984038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985107605U Expired JPH0247832Y2 (de) | 1985-07-16 | 1985-07-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0247832Y2 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007013227A1 (ja) * | 2005-07-29 | 2007-02-01 | Kitz Sct Corporation | スライドバルブ |
WO2008139937A1 (ja) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | バルブおよび該バルブを備えた処理装置 |
JP2011506873A (ja) * | 2007-12-11 | 2011-03-03 | アイゼントロピック リミテッド | バルブ |
-
1985
- 1985-07-16 JP JP1985107605U patent/JPH0247832Y2/ja not_active Expired
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007013227A1 (ja) * | 2005-07-29 | 2007-02-01 | Kitz Sct Corporation | スライドバルブ |
JP2011247426A (ja) * | 2005-07-29 | 2011-12-08 | Kitz Sct:Kk | スライドバルブ |
WO2008139937A1 (ja) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | バルブおよび該バルブを備えた処理装置 |
JP5011382B2 (ja) * | 2007-05-08 | 2012-08-29 | 東京エレクトロン株式会社 | バルブおよび該バルブを備えた処理装置 |
JP2011506873A (ja) * | 2007-12-11 | 2011-03-03 | アイゼントロピック リミテッド | バルブ |
Also Published As
Publication number | Publication date |
---|---|
JPH0247832Y2 (de) | 1990-12-14 |
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