JPS6216868U - - Google Patents

Info

Publication number
JPS6216868U
JPS6216868U JP10760585U JP10760585U JPS6216868U JP S6216868 U JPS6216868 U JP S6216868U JP 10760585 U JP10760585 U JP 10760585U JP 10760585 U JP10760585 U JP 10760585U JP S6216868 U JPS6216868 U JP S6216868U
Authority
JP
Japan
Prior art keywords
valve body
opened
closed
gate valve
process equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10760585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247832Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985107605U priority Critical patent/JPH0247832Y2/ja
Publication of JPS6216868U publication Critical patent/JPS6216868U/ja
Application granted granted Critical
Publication of JPH0247832Y2 publication Critical patent/JPH0247832Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP1985107605U 1985-07-16 1985-07-16 Expired JPH0247832Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985107605U JPH0247832Y2 (OSRAM) 1985-07-16 1985-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985107605U JPH0247832Y2 (OSRAM) 1985-07-16 1985-07-16

Publications (2)

Publication Number Publication Date
JPS6216868U true JPS6216868U (OSRAM) 1987-01-31
JPH0247832Y2 JPH0247832Y2 (OSRAM) 1990-12-14

Family

ID=30984038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985107605U Expired JPH0247832Y2 (OSRAM) 1985-07-16 1985-07-16

Country Status (1)

Country Link
JP (1) JPH0247832Y2 (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007013227A1 (ja) * 2005-07-29 2007-02-01 Kitz Sct Corporation スライドバルブ
WO2008139937A1 (ja) * 2007-05-08 2008-11-20 Tokyo Electron Limited バルブおよび該バルブを備えた処理装置
JP2011506873A (ja) * 2007-12-11 2011-03-03 アイゼントロピック リミテッド バルブ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007013227A1 (ja) * 2005-07-29 2007-02-01 Kitz Sct Corporation スライドバルブ
JP2011247426A (ja) * 2005-07-29 2011-12-08 Kitz Sct:Kk スライドバルブ
WO2008139937A1 (ja) * 2007-05-08 2008-11-20 Tokyo Electron Limited バルブおよび該バルブを備えた処理装置
JP5011382B2 (ja) * 2007-05-08 2012-08-29 東京エレクトロン株式会社 バルブおよび該バルブを備えた処理装置
JP2011506873A (ja) * 2007-12-11 2011-03-03 アイゼントロピック リミテッド バルブ

Also Published As

Publication number Publication date
JPH0247832Y2 (OSRAM) 1990-12-14

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