JPS62168452U - - Google Patents

Info

Publication number
JPS62168452U
JPS62168452U JP5669986U JP5669986U JPS62168452U JP S62168452 U JPS62168452 U JP S62168452U JP 5669986 U JP5669986 U JP 5669986U JP 5669986 U JP5669986 U JP 5669986U JP S62168452 U JPS62168452 U JP S62168452U
Authority
JP
Japan
Prior art keywords
gas
temperature
environmental test
flow path
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5669986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5669986U priority Critical patent/JPS62168452U/ja
Publication of JPS62168452U publication Critical patent/JPS62168452U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
JP5669986U 1986-04-15 1986-04-15 Pending JPS62168452U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5669986U JPS62168452U (enExample) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5669986U JPS62168452U (enExample) 1986-04-15 1986-04-15

Publications (1)

Publication Number Publication Date
JPS62168452U true JPS62168452U (enExample) 1987-10-26

Family

ID=30885747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5669986U Pending JPS62168452U (enExample) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPS62168452U (enExample)

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