JPS61164255U - - Google Patents
Info
- Publication number
- JPS61164255U JPS61164255U JP4678985U JP4678985U JPS61164255U JP S61164255 U JPS61164255 U JP S61164255U JP 4678985 U JP4678985 U JP 4678985U JP 4678985 U JP4678985 U JP 4678985U JP S61164255 U JPS61164255 U JP S61164255U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heat treatment
- atmospheric gas
- flow rate
- treatment container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4678985U JPS61164255U (enExample) | 1985-04-01 | 1985-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4678985U JPS61164255U (enExample) | 1985-04-01 | 1985-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164255U true JPS61164255U (enExample) | 1986-10-11 |
Family
ID=30561513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4678985U Pending JPS61164255U (enExample) | 1985-04-01 | 1985-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164255U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0264391A (ja) * | 1988-08-30 | 1990-03-05 | Ulvac Corp | 真空熱処理炉 |
| JP2017110841A (ja) * | 2015-12-15 | 2017-06-22 | 富士電機機器制御株式会社 | 熱処理装置 |
-
1985
- 1985-04-01 JP JP4678985U patent/JPS61164255U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0264391A (ja) * | 1988-08-30 | 1990-03-05 | Ulvac Corp | 真空熱処理炉 |
| JP2017110841A (ja) * | 2015-12-15 | 2017-06-22 | 富士電機機器制御株式会社 | 熱処理装置 |
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