JPS62166651U - - Google Patents
Info
- Publication number
- JPS62166651U JPS62166651U JP5380386U JP5380386U JPS62166651U JP S62166651 U JPS62166651 U JP S62166651U JP 5380386 U JP5380386 U JP 5380386U JP 5380386 U JP5380386 U JP 5380386U JP S62166651 U JPS62166651 U JP S62166651U
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- film formed
- window
- semiconductor substrate
- shot metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5380386U JPS62166651U (enrdf_load_stackoverflow) | 1986-04-09 | 1986-04-09 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5380386U JPS62166651U (enrdf_load_stackoverflow) | 1986-04-09 | 1986-04-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62166651U true JPS62166651U (enrdf_load_stackoverflow) | 1987-10-22 |
Family
ID=30880201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5380386U Pending JPS62166651U (enrdf_load_stackoverflow) | 1986-04-09 | 1986-04-09 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62166651U (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140768A (ja) * | 1987-11-27 | 1989-06-01 | Sony Corp | 半導体装置 |
-
1986
- 1986-04-09 JP JP5380386U patent/JPS62166651U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140768A (ja) * | 1987-11-27 | 1989-06-01 | Sony Corp | 半導体装置 |