JPS6216573B2 - - Google Patents
Info
- Publication number
- JPS6216573B2 JPS6216573B2 JP54119885A JP11988579A JPS6216573B2 JP S6216573 B2 JPS6216573 B2 JP S6216573B2 JP 54119885 A JP54119885 A JP 54119885A JP 11988579 A JP11988579 A JP 11988579A JP S6216573 B2 JPS6216573 B2 JP S6216573B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- recess
- vibrating body
- terminal board
- crystal resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 117
- 239000000758 substrate Substances 0.000 claims description 26
- 238000000605 extraction Methods 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000004927 fusion Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0504—Holders; Supports for bulk acoustic wave devices
- H03H9/0509—Holders; Supports for bulk acoustic wave devices consisting of adhesive elements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/58—Multiple crystal filters
- H03H9/582—Multiple crystal filters implemented with thin-film techniques
- H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/588—Membranes
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11988579A JPS5643815A (en) | 1979-09-18 | 1979-09-18 | Quartz oscillator |
DE19803035088 DE3035088A1 (de) | 1979-09-18 | 1980-09-17 | Schwingquarzanordnung |
CA000360439A CA1161943A (en) | 1979-09-18 | 1980-09-17 | Crystal oscillator device with one electrode at the mouth of a through-hole |
GB8030157A GB2063558B (en) | 1979-09-18 | 1980-09-18 | Crystal oscillator device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11988579A JPS5643815A (en) | 1979-09-18 | 1979-09-18 | Quartz oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5643815A JPS5643815A (en) | 1981-04-22 |
JPS6216573B2 true JPS6216573B2 (hu) | 1987-04-13 |
Family
ID=14772635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11988579A Granted JPS5643815A (en) | 1979-09-18 | 1979-09-18 | Quartz oscillator |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5643815A (hu) |
CA (1) | CA1161943A (hu) |
DE (1) | DE3035088A1 (hu) |
GB (1) | GB2063558B (hu) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0059447B1 (en) * | 1981-02-28 | 1985-05-15 | Kinseki, Ltd. | Piezoelectric oscillator device |
JPS59189713A (ja) * | 1983-04-11 | 1984-10-27 | Toko Inc | 発振子およびその製造方法 |
GB2146839B (en) * | 1983-07-27 | 1987-04-01 | Nihon Dempa Kogyo Co | Piezoelectric resonator |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5417504Y2 (hu) * | 1975-04-21 | 1979-07-05 | ||
JPS53118391U (hu) * | 1977-02-28 | 1978-09-20 |
-
1979
- 1979-09-18 JP JP11988579A patent/JPS5643815A/ja active Granted
-
1980
- 1980-09-17 CA CA000360439A patent/CA1161943A/en not_active Expired
- 1980-09-17 DE DE19803035088 patent/DE3035088A1/de not_active Withdrawn
- 1980-09-18 GB GB8030157A patent/GB2063558B/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CA1161943A (en) | 1984-02-07 |
GB2063558A (en) | 1981-06-03 |
JPS5643815A (en) | 1981-04-22 |
DE3035088A1 (de) | 1981-04-02 |
GB2063558B (en) | 1984-01-25 |
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