JPS62165575U - - Google Patents
Info
- Publication number
- JPS62165575U JPS62165575U JP4341987U JP4341987U JPS62165575U JP S62165575 U JPS62165575 U JP S62165575U JP 4341987 U JP4341987 U JP 4341987U JP 4341987 U JP4341987 U JP 4341987U JP S62165575 U JPS62165575 U JP S62165575U
- Authority
- JP
- Japan
- Prior art keywords
- card
- contact pin
- pin groups
- wafer
- die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図ａ，ｂは、従来の半導体装置測定用プロ
ーブカードの平面図および側面図、第２図ａ，ｂ
および第３図は本考案による半導体装置測定用プ
ローブカードの実施例を示すもので、第２図ａは
平面図、第２図ｂ、第３図はそれぞれ側面図であ
る。
１…プローブカード、２，２１，２２，２３…
接触ピン、３…金属配線、４…カードの開口、１
０…半導体ウエハー、１１，１１′，１１″，１
１…ダイ区域、１２，１２′，１２″，１２
…金属パツド。
Figures 1a and b are a plan view and a side view of a conventional probe card for measuring semiconductor devices, and Figures 2a and b are
3 shows an embodiment of a probe card for measuring semiconductor devices according to the present invention, in which FIG. 2a is a plan view, and FIGS. 2b and 3 are side views, respectively. 1... Probe card, 2, 21, 22, 23...
Contact pin, 3... Metal wiring, 4... Card opening, 1
0...Semiconductor wafer, 11, 11', 11'', 1
1...Die area, 12, 12', 12'', 12
...Metal pad.
Claims (1)
ウエハー上で一列に配置され互いに隣合つた複数
の集積回路ダイの配置位置に対応して設けられ、
該ダイ上のパツドに接触する複数組の接触ピン群
と、これら接触ピン群を上記カードの測定装置用
端子に接続するカード上に設けられた配線とを具
備したことを特徴とする半導体装置測定用プロー
ブカード。 a card and a plurality of integrated circuit dies arranged in a row and adjacent to each other on the wafer in one opening of the card;
Semiconductor device measurement characterized by comprising a plurality of contact pin groups that contact pads on the die, and wiring provided on the card that connects these contact pin groups to measuring device terminals of the card. Probe card for.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341987U JPS62165575U (en) | 1987-03-26 | 1987-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4341987U JPS62165575U (en) | 1987-03-26 | 1987-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62165575U true JPS62165575U (en) | 1987-10-21 |
Family
ID=30860258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4341987U Pending JPS62165575U (en) | 1987-03-26 | 1987-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165575U (en) |
-
1987
- 1987-03-26 JP JP4341987U patent/JPS62165575U/ja active Pending
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