JPS62163951U - - Google Patents

Info

Publication number
JPS62163951U
JPS62163951U JP5338886U JP5338886U JPS62163951U JP S62163951 U JPS62163951 U JP S62163951U JP 5338886 U JP5338886 U JP 5338886U JP 5338886 U JP5338886 U JP 5338886U JP S62163951 U JPS62163951 U JP S62163951U
Authority
JP
Japan
Prior art keywords
vehicle
smif pod
smif
semiconductor manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5338886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249722Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5338886U priority Critical patent/JPH0249722Y2/ja
Priority to US07/018,993 priority patent/US4826360A/en
Priority to EP87301888A priority patent/EP0239266A3/de
Priority to CA000531391A priority patent/CA1271271A/en
Priority to KR870002102A priority patent/KR870009446A/ko
Publication of JPS62163951U publication Critical patent/JPS62163951U/ja
Application granted granted Critical
Publication of JPH0249722Y2 publication Critical patent/JPH0249722Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5338886U 1986-03-10 1986-04-09 Expired JPH0249722Y2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5338886U JPH0249722Y2 (de) 1986-04-09 1986-04-09
US07/018,993 US4826360A (en) 1986-03-10 1987-02-25 Transfer system in a clean room
EP87301888A EP0239266A3 (de) 1986-03-10 1987-03-04 Transportsystem in einem sauberen Raum
CA000531391A CA1271271A (en) 1986-03-10 1987-03-06 Semiconductor wafer transport system in a clean room
KR870002102A KR870009446A (ko) 1986-03-10 1987-03-09 크린룸 내의 이송 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5338886U JPH0249722Y2 (de) 1986-04-09 1986-04-09

Publications (2)

Publication Number Publication Date
JPS62163951U true JPS62163951U (de) 1987-10-17
JPH0249722Y2 JPH0249722Y2 (de) 1990-12-27

Family

ID=30879406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5338886U Expired JPH0249722Y2 (de) 1986-03-10 1986-04-09

Country Status (1)

Country Link
JP (1) JPH0249722Y2 (de)

Also Published As

Publication number Publication date
JPH0249722Y2 (de) 1990-12-27

Similar Documents

Publication Publication Date Title
JPS5845360U (ja) サブストレ−トの着脱装置
JPS62163951U (de)
JPS6359329U (de)
JPS6232539U (de)
JPS63177035U (de)
JPH0463643U (de)
JPH0180933U (de)
JPH0363937U (de)
JPS63195734U (de)
JPS58120643U (ja) ウエハ処理用バスケツト
JPS5984843U (ja) 半導体製造用キヤリアハンガ
JPS63144953U (de)
JPS58114042U (ja) シリコンウエハ−の洗浄装置
JPS6242242U (de)
JPS6359332U (de)
JPS6252933U (de)
JPH01173940U (de)
JPS63102236U (de)
JPS6355436U (de)
JPS6329945U (de)
JPS62172153U (de)
JPS6437043U (de)
JPH01161334U (de)
JPS60927U (ja) 半導体ウエハ貼付装置
JPH01139433U (de)