JPS62162257U - - Google Patents

Info

Publication number
JPS62162257U
JPS62162257U JP4840286U JP4840286U JPS62162257U JP S62162257 U JPS62162257 U JP S62162257U JP 4840286 U JP4840286 U JP 4840286U JP 4840286 U JP4840286 U JP 4840286U JP S62162257 U JPS62162257 U JP S62162257U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum chamber
feed screw
screw shaft
cart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4840286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4840286U priority Critical patent/JPS62162257U/ja
Publication of JPS62162257U publication Critical patent/JPS62162257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP4840286U 1986-03-31 1986-03-31 Pending JPS62162257U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4840286U JPS62162257U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4840286U JPS62162257U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62162257U true JPS62162257U (enrdf_load_stackoverflow) 1987-10-15

Family

ID=30869895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4840286U Pending JPS62162257U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62162257U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0556953U (ja) * 1992-01-17 1993-07-30 日新電機株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0556953U (ja) * 1992-01-17 1993-07-30 日新電機株式会社 基板処理装置

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