JPS62191866U - - Google Patents

Info

Publication number
JPS62191866U
JPS62191866U JP7987686U JP7987686U JPS62191866U JP S62191866 U JPS62191866 U JP S62191866U JP 7987686 U JP7987686 U JP 7987686U JP 7987686 U JP7987686 U JP 7987686U JP S62191866 U JPS62191866 U JP S62191866U
Authority
JP
Japan
Prior art keywords
cart
vacuum
engaging rod
conveying
guide member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7987686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7987686U priority Critical patent/JPS62191866U/ja
Publication of JPS62191866U publication Critical patent/JPS62191866U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP7987686U 1986-05-26 1986-05-26 Pending JPS62191866U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7987686U JPS62191866U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7987686U JPS62191866U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Publications (1)

Publication Number Publication Date
JPS62191866U true JPS62191866U (enrdf_load_stackoverflow) 1987-12-05

Family

ID=30930160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7987686U Pending JPS62191866U (enrdf_load_stackoverflow) 1986-05-26 1986-05-26

Country Status (1)

Country Link
JP (1) JPS62191866U (enrdf_load_stackoverflow)

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