JPS62162256U - - Google Patents

Info

Publication number
JPS62162256U
JPS62162256U JP4840186U JP4840186U JPS62162256U JP S62162256 U JPS62162256 U JP S62162256U JP 4840186 U JP4840186 U JP 4840186U JP 4840186 U JP4840186 U JP 4840186U JP S62162256 U JPS62162256 U JP S62162256U
Authority
JP
Japan
Prior art keywords
vacuum chamber
film
vacuum
cart
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4840186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4840186U priority Critical patent/JPS62162256U/ja
Publication of JPS62162256U publication Critical patent/JPS62162256U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP4840186U 1986-03-31 1986-03-31 Pending JPS62162256U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4840186U JPS62162256U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4840186U JPS62162256U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62162256U true JPS62162256U (enrdf_load_stackoverflow) 1987-10-15

Family

ID=30869893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4840186U Pending JPS62162256U (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62162256U (enrdf_load_stackoverflow)

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