JPS62160691U - - Google Patents
Info
- Publication number
- JPS62160691U JPS62160691U JP4910986U JP4910986U JPS62160691U JP S62160691 U JPS62160691 U JP S62160691U JP 4910986 U JP4910986 U JP 4910986U JP 4910986 U JP4910986 U JP 4910986U JP S62160691 U JPS62160691 U JP S62160691U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- dry air
- pressure
- injection device
- pressure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4910986U JPS62160691U (xx) | 1986-04-02 | 1986-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4910986U JPS62160691U (xx) | 1986-04-02 | 1986-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62160691U true JPS62160691U (xx) | 1987-10-13 |
Family
ID=30871252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4910986U Pending JPS62160691U (xx) | 1986-04-02 | 1986-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62160691U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013056310A (ja) * | 2011-09-09 | 2013-03-28 | Olympus Corp | 洗浄装置 |
-
1986
- 1986-04-02 JP JP4910986U patent/JPS62160691U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013056310A (ja) * | 2011-09-09 | 2013-03-28 | Olympus Corp | 洗浄装置 |