JPH0487638U - - Google Patents
Info
- Publication number
- JPH0487638U JPH0487638U JP12972190U JP12972190U JPH0487638U JP H0487638 U JPH0487638 U JP H0487638U JP 12972190 U JP12972190 U JP 12972190U JP 12972190 U JP12972190 U JP 12972190U JP H0487638 U JPH0487638 U JP H0487638U
- Authority
- JP
- Japan
- Prior art keywords
- injection nozzle
- pure water
- pressure gas
- wafer
- gas injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12972190U JPH0487638U (xx) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12972190U JPH0487638U (xx) | 1990-11-30 | 1990-11-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0487638U true JPH0487638U (xx) | 1992-07-30 |
Family
ID=31877112
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12972190U Pending JPH0487638U (xx) | 1990-11-30 | 1990-11-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0487638U (xx) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07321082A (ja) * | 1994-05-27 | 1995-12-08 | Nec Corp | 基板の洗浄方法および洗浄装置 |
JP2015076468A (ja) * | 2013-10-08 | 2015-04-20 | 株式会社ディスコ | スピンナー洗浄装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63110639A (ja) * | 1986-10-28 | 1988-05-16 | Nec Corp | 集積回路装置の製造方法 |
JPH02288230A (ja) * | 1989-04-27 | 1990-11-28 | Nec Kyushu Ltd | 半導体基板の洗浄装置 |
-
1990
- 1990-11-30 JP JP12972190U patent/JPH0487638U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63110639A (ja) * | 1986-10-28 | 1988-05-16 | Nec Corp | 集積回路装置の製造方法 |
JPH02288230A (ja) * | 1989-04-27 | 1990-11-28 | Nec Kyushu Ltd | 半導体基板の洗浄装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07321082A (ja) * | 1994-05-27 | 1995-12-08 | Nec Corp | 基板の洗浄方法および洗浄装置 |
JP2015076468A (ja) * | 2013-10-08 | 2015-04-20 | 株式会社ディスコ | スピンナー洗浄装置 |